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EP0831680
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EP About this file: EP0831680
| EP0831680 - DEVICE AND METHOD FOR PLASMA TREATMENT [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 07.07.2000 Database last updated on 31.08.2024 | Most recent event Tooltip | 07.07.2000 | Application deemed to be withdrawn | published on 23.08.2000 [2000/34] | Applicant(s) | For all designated states SUMITOMO METAL INDUSTRIES, LTD. 5-33, Kitahama 4-chome Chuo-ku Osaka-shi Osaka 541-0041 / JP | [N/P] |
| Former [1998/13] | For all designated states SUMITOMO METAL INDUSTRIES, LTD. 5-33, Kitahama 4-chome, Chuo-ku Osaka-Shi, Osaka 541 / JP | Inventor(s) | 01 /
MABUCHI, Hiroshi 25-3-501, Kaminoshimacho 3-chome Amagasaki-shi Hyogo 661 / JP | 02 /
HAYAMI, Toshihiro 3-18, Koshienguchi 1-chome Nishinomiya-shi Hyogo 663 / JP | 03 /
IDA, Hideo 682, Oume Oume-shi Tokyo 198 / JP | 04 /
MURAKAMI, Tomomi Sumitomo-Koto-Ryo 17-85, Higashinaniwacho 2-chome Amagasaki-shi Hyogo 660 / JP | 05 /
TAKEDA, Naohiko 28-7-101, Koshiencho Nishinomiya-shi Hyogo 663 / JP | 06 /
TSUYUGUCHI, Junya 21-5-108, Koshiencho Nishinomiya-shi Hyogo 663 / JP | 07 /
KATAYAMA, Katsuo 9-1-305, Minamitsukaguchicho 6-chome Amagasaki-shi Hyogo 661 / JP | [1998/13] | Representative(s) | Uchida, Kenji, et al Fédit-Loriot 38, avenue Hoche 75008 Paris / FR | [N/P] |
| Former [1999/14] | Uchida, Kenji (JP), et al Cabinet Fedit-Loriot 38,avenue Hoche F-75008 Paris / FR | ||
| Former [1999/13] | Hasenrader, Hubert, et al Cabinet Beau de Loménie 158, rue de l'Université 75340 Paris Cédex 07 / FR | ||
| Former [1998/13] | Uchida, Kenji, et al Cabinet Beau de Loménie 158, rue de l'Université 75340 Paris Cedex 07 / FR | Application number, filing date | 97908538.8 | 27.03.1997 | [1998/13] | WO1997JP01070 | Priority number, date | JP19960073467 | 28.03.1996 Original published format: JP 7346796 | JP19970018912 | 31.01.1997 Original published format: JP 1891297 | [1998/13] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9736461 | Date: | 02.10.1997 | Language: | EN | [1997/42] | Type: | A1 Application with search report | No.: | EP0831680 | Date: | 25.03.1998 | Language: | EN | The application published by WIPO in one of the EPO official languages on 02.10.1997 takes the place of the publication of the European patent application. | [1998/13] | Search report(s) | International search report - published on: | JP | 02.10.1997 | (Supplementary) European search report - dispatched on: | EP | 20.12.1999 | Classification | IPC: | H05H1/46, H01L21/205, H01L21/302, C23C16/50, C23F4/00, H01J37/32 | [2000/05] | CPC: |
B05D1/62 (EP,US);
C23C16/4401 (EP,US);
C23C16/511 (EP,US);
H01J37/32192 (EP,US);
H01J37/32238 (EP,US);
H05H1/46 (KR);
H01J2237/022 (EP,US)
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| Former IPC [1998/13] | H05H1/46, H01L21/205, H01L21/302, C23C16/50, C23F4/00 | Designated contracting states | DE, FR, GB [1998/13] | Title | German: | VORRICHTUNG UND VERFAHREN ZUR PLASMABEHANDLUNG | [1998/13] | English: | DEVICE AND METHOD FOR PLASMA TREATMENT | [1998/13] | French: | PROCEDE ET DISPOSITIF DE TRAITEMENT PLASMIQUE | [1998/13] | Entry into regional phase | 15.12.1997 | Translation filed | 12.12.1997 | National basic fee paid | 12.12.1997 | Search fee paid | 12.12.1997 | Designation fee(s) paid | 13.03.1998 | Examination fee paid | Examination procedure | 13.03.1998 | Examination requested [1998/20] | 23.02.2000 | Application deemed to be withdrawn, date of legal effect [2000/34] | 28.03.2000 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2000/34] | Fees paid | Renewal fee | 12.02.1999 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.03.2000 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPH083770 ; | [A]EP0478283 (HITACHI LTD [JP]) [A] 4 * column 24, line 23 - line 33 * * figure 28 * | [X] - PATENT ABSTRACTS OF JAPAN, (19960531), vol. 096, no. 005, & JP08003770 A 19960109 (NEC CORP;OTHERS: 01) [X] 1,2,5 * abstract * | International search | [A]JPH04117437U ; | [A]JPH07335567 (NEC CORP, et al); | [A]JPH06112138 (SUMITOMO METAL IND) |