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Extract from the Register of European Patents

EP About this file: EP0943119

EP0943119 - RETICLE THAT COMPENSATES FOR LENS ERROR IN A PHOTOLITHOGRAPHIC SYSTEM [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  17.05.2002
Database last updated on 25.09.2024
Most recent event   Tooltip17.05.2002No opposition filed within time limitpublished on 03.07.2002  [2002/27]
Applicant(s)For all designated states
ADVANCED MICRO DEVICES, INC.
5204 East Ben White Boulevard M/S 562
Austin TX 78741 / US
[N/P]
Former [1999/38]For all designated states
Advanced Micro Devices, Inc.
Mail Stop 562, 5204 East Ben White Boulevard
Austin, TX 78741 / US
Inventor(s)01 / MOORE, Bradley, T.
1502 Johnny Miller Trail
Austin, TX 78746 / US
02 / DAWSON, Robert
3504 Beartree Circle
Austin, TX 78730 / US
03 / FULFORD, H., Jim
9808 Woodshire Drive
Austin, TX 78748 / US
04 / GARDNER, Mark, I.
P.O. Box 249,Highway 535
Cedar Creek, TX 78612 / US
05 / HAUSE, Frederick, N.
4702 Circle Oak Cove
Austin, TX 78749 / US
06 / MICHAEL, Mark, W.
1805 Dayflower Trace
Cedar Park, TX 78613 / US
07 / WRISTERS, Derick, J.
1904 Terish Cove
Austin, TX 78728 / US
[1999/38]
Representative(s)Picker, Madeline Margaret
Brookes Batchellor
1 Boyne Park
Tunbridge Wells
Kent TN4 8EL / GB
[N/P]
Former [1999/38]Picker, Madeline Margaret
Brookes & Martin, High Holborn House, 52/54 High Holborn
London WC1V 6SE / GB
Application number, filing date97952347.904.12.1997
[1999/38]
WO1997US22616
Priority number, dateUS1996076003104.12.1996         Original published format: US 760031
[1999/38]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9825182
Date:11.06.1998
Language:EN
[1998/23]
Type: A1 Application with search report 
No.:EP0943119
Date:22.09.1999
Language:EN
The application published by WIPO in one of the EPO official languages on 11.06.1998 takes the place of the publication of the European patent application.
[1999/38]
Type: B1 Patent specification 
No.:EP0943119
Date:11.07.2001
Language:EN
[2001/28]
Search report(s)International search report - published on:EP11.06.1998
ClassificationIPC:G03F7/20
[1999/38]
CPC:
G03F7/70433 (EP,US); G03F1/62 (KR); G03F1/70 (EP,US);
G03F1/72 (KR); G03F7/70241 (EP,US)
Designated contracting statesDE,   FR,   GB,   NL [1999/38]
TitleGerman:MASKE ZUR AUSGLEICHUNG EINES LINSENFEHLERS IN EINEM PHOTOLITHOGRAPHISCHEN SYSTEM[1999/38]
English:RETICLE THAT COMPENSATES FOR LENS ERROR IN A PHOTOLITHOGRAPHIC SYSTEM[1999/38]
French:RETICULE CORRIGEANT LES DEFAUTS DE LENTILLE DANS UN SYSTEME DE PHOTOLITHOGRAVURE[1999/38]
Entry into regional phase01.07.1999National basic fee paid 
01.07.1999Designation fee(s) paid 
01.07.1999Examination fee paid 
Examination procedure17.06.1998Request for preliminary examination filed
International Preliminary Examining Authority: EP
01.07.1999Examination requested  [1999/38]
23.08.2000Despatch of communication of intention to grant (Approval: Yes)
28.12.2000Communication of intention to grant the patent
08.03.2001Fee for grant paid
08.03.2001Fee for publishing/printing paid
Opposition(s)12.04.2002No opposition filed within time limit [2002/27]
Fees paidRenewal fee
01.07.1999Renewal fee patent year 03
07.12.2000Renewal fee patent year 04
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[DX]US5308991  (KAPLAN SHAY [US]) [DX] 1,5-8,10-14,21,22,26-30 * column 5, line 7 - column 7, line 42; figure - *;
 [XY]EP0307726  (MOTOROLA INC [US]) [X] 1,2,5-8,10-14,21-23,26-30 * column 4, line 4 - column 5, line 17 * * column 6, line 25 - line 27 * * figure 1 * [Y] 9,15-19;
 [Y]DE1522285  (TELEFUNKEN PATENT) [Y] 9,15-19 * figure -; claims 1,2,4-6 *;
 [A]EP0689099  (CANON KK [JP]) [A] 3,24 * column 6, line 19 - column 9, line 18 * * figures 1,2,4,5 *;
 [A]EP0724199  (NIPPON KOGAKU KK [JP]) [A] 1,11,26-30 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.