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Extract from the Register of European Patents

EP About this file: EP0989204

EP0989204 - Process for preparing nitride film [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  25.04.2003
Database last updated on 10.05.2025
Most recent event   Tooltip25.04.2003Application deemed to be withdrawnpublished on 11.06.2003  [2003/24]
Applicant(s)For all designated states
JAPAN PIONICS CO., LTD.
1-3, Nishishinbashi 1-chome Minato-ku
Tokyo 105 / JP
[N/P]
Former [2000/13]For all designated states
JAPAN PIONICS CO., LTD.
1-3, Nishishinbashi 1-chome
Minato-ku, Tokyo 105 / JP
Inventor(s)01 / Takamatsu, Yukichi c/o Japan Pionics Co., Ltd.
Hiratsuka Laboratory 5181, Tamura
Hiratsuka-shi, Kanagawa-ken / JP
02 / Yoneyama, Takeo c/o Japan Pionics Co., Ltd.
Hiratsuka Laboratory 5181, Tamura
Hiratsuka-shi, Kanagawa-ken / JP
03 / Ishihama, Yoshiyasu c/o Japan Pionics Co., Ltd.
Hiratsuka Laboratory 5181, Tamura
Hiratsuka-shi, Kanagawa-ken / JP
[2000/13]
Representative(s)Gille Hrabal Partnerschaftsgesellschaft mbB Patentanwälte
Brucknerstraße 20
40593 Düsseldorf / DE
[N/P]
Former [2000/13]Türk - Gille - Hrabal - Struck
Patentanwälte - European Patent Attorneys, Brucknerstrasse 20
40593 Düsseldorf / DE
Application number, filing date98118259.525.09.1998
[2000/13]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0989204
Date:29.03.2000
Language:EN
[2000/13]
Search report(s)(Supplementary) European search report - dispatched on:EP20.10.1999
ClassificationIPC:C23C16/34, C23C8/26
[2000/13]
CPC:
C23C16/34 (EP)
Designated contracting statesDE,   FR,   GB [2000/49]
Former [2000/13]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Verfahren zur Herstellung einer Nitridschicht[2000/13]
English:Process for preparing nitride film[2000/13]
French:Procédé de préparation d' une couche de nitrure[2000/13]
Examination procedure02.09.2000Examination requested  [2000/44]
23.07.2002Despatch of a communication from the examining division (Time limit: M04)
03.12.2002Application deemed to be withdrawn, date of legal effect  [2003/24]
13.01.2003Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2003/24]
Fees paidRenewal fee
26.09.2000Renewal fee patent year 03
25.09.2001Renewal fee patent year 04
20.09.2002Renewal fee patent year 05
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[Y]JPH10182575  ;
 [Y]JPH07180058  ;
 [Y]JPS6052578  ;
 [E]EP0896406  (MATSUSHITA ELECTRIC IND CO LTD) [E] 1 * paragraph [0181] *;
 [XY]DE4342730  (PEPPLER PETER DR) [X] 2 * column 2, line 59 - column 3, line 11 * [Y] 3,4;
 [A]JPH10190135  ;
 [A]JPS6372661
 [XY]  - NISHIDE S ET AL, "Study of the pyrolysis of tertiary butylhydrazine and GaN film growth", SECOND INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS, TOKUSHIMA, JAPAN, 27-31 OCT. 1997, ISSN 0022-0248, Journal of Crystal Growth, June 1998, Elsevier, Netherlands, vol. 189-190, pages 325 - 329, XP002093688 [X] 1,5 * paragraph [0002] * [Y] 3,4,6,7

DOI:   http://dx.doi.org/10.1016/S0022-0248(98)00279-6
 [Y]  - PATENT ABSTRACTS OF JAPAN, (19981031), vol. 098, no. 012, & JP10182575 A 19980707 (JAPAN PIONICS CO LTD) [Y] 3,4 * abstract *
 [Y]  - PATENT ABSTRACTS OF JAPAN, (19951130), vol. 095, no. 010, & JP07180058 A 19950718 (HITACHI LTD) [Y] 6 * abstract *
 [Y]  - DATABASE WPI, 1, Derwent World Patents Index, vol. 85, no. 18, Database accession no. 85-108095, XP002093700 & JPS6052578 A 19850325 (NEC CORP) [Y] 7 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19981031), vol. 1998, no. - , & JP10190135 A 19980721 (XEROX CORP) [A] 2-4 * abstract *
 [A]  - DATABASE WPI, 1, Derwent World Patents Index, vol. 88, no. 23, Database accession no. 1988129551, XP002117394 & JPS6372661 A 19880402 (SAKB) [A] 2-4 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.