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Extract from the Register of European Patents

EP About this file: EP0911883

EP0911883 - Bipolar transistor with a SiGe epitaxial base layer and method of fabrication the same [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  17.09.2004
Database last updated on 14.09.2024
Most recent event   Tooltip17.09.2004Withdrawal of applicationpublished on 03.11.2004  [2004/45]
Applicant(s)For all designated states
NEC Electronics Corporation
1753 Shimonumabe Nakahara-ku
Kawasaki, Kanagawa 211-8668 / JP
[N/P]
Former [2003/18]For all designated states
NEC Electronics Corporation
1753 Shimonumabe, Nakahara-ku
Kawasaki, Kanagawa 211-8668 / JP
Former [1999/17]For all designated states
NEC CORPORATION
7-1, Shiba 5-chome Minato-ku
Tokyo / JP
Inventor(s)01 / Aoyama, Tohru
c/o NEC Corporation, 7-1, Shiba 5-chome
Minato-ku, Tokyo / JP
[1999/17]
Representative(s)Glawe, Delfs, Moll
Partnerschaft mbB von
Patent- und Rechtsanwälten
Postfach 26 01 62
80058 München / DE
[N/P]
Former [1999/17]Glawe, Delfs, Moll & Partner
Patentanwälte Postfach 26 01 62
80058 München / DE
Application number, filing date98119698.319.10.1998
[1999/17]
Priority number, dateJP1997029188724.10.1997         Original published format: JP 29188797
[1999/17]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0911883
Date:28.04.1999
Language:EN
[1999/17]
Type: A3 Search report 
No.:EP0911883
Date:12.05.1999
[1999/19]
Search report(s)(Supplementary) European search report - dispatched on:EP29.03.1999
ClassificationIPC:H01L29/737, H01L21/331
[1999/17]
CPC:
H01L29/66242 (EP,US); H01L27/06 (KR); H01L29/7378 (EP,US)
Designated contracting statesDE,   FR,   GB [2000/03]
Former [1999/17]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Bipolartransistor mit einer SiGe epitaktischen Basisschicht und Verfahren zur Herstellung[1999/17]
English:Bipolar transistor with a SiGe epitaxial base layer and method of fabrication the same[1999/17]
French:Transistor bipolaire avec une couche de base épitaxiale en SiGe et procédé pour sa fabrication[1999/17]
Examination procedure01.04.1999Examination requested  [1999/22]
08.09.2004Application withdrawn by applicant  [2004/45]
Fees paidRenewal fee
18.10.2000Renewal fee patent year 03
22.10.2001Renewal fee patent year 04
23.10.2002Renewal fee patent year 05
21.10.2003Renewal fee patent year 06
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Documents cited:Search[A]EP0701287  (NEC CORP [JP]) [A] 1,7 * abstract * * column 11, line 54 - line 58 *;
 [XDA]  - AOYAMA T ET AL, "CL2 INFLUENCE ON SI1-XGEX BASE EPITAXIAL LAYER GROWTH FOR HIGH SPEED BIPOLAR TRANSISTOR", INTERNATIONAL CONFERENCE ON SOLID STATE DEVICES AND MATERIALS, (199709), page 528/529, XP000728224 [XD] 1-6 * figures 1B,3,4 * * page 528, column 1, line 17 - line 21 * * paragraph [0002] * * page 529, column 2, line 1 - line 13 * [A] 7-10
 [AD]  - SATO F ET AL, "A SUPER SELF-ALIGNED SELECTIVELY GROWN SIGE BASE (SSSB) BIPOLAR TRANSISTOR FABRICATED BY COLD-WALL TYPE UHV/CVD TECHNOLOGY", IEEE TRANSACTIONS ON ELECTRON DEVICES, (19940801), vol. 41, no. 8, pages 1373 - 1378, XP000483757 [AD] 1-10 * page 1374, column 1 * * page 1375, column 1 * * table 1 *

DOI:   http://dx.doi.org/10.1109/16.297732
 [A]  - TORU TATSUMI ET AL, "SELECTIVE EPITAXIAL GROWTH BY UHV-CVD USING SI2H6 AND CL2", JOURNAL OF CRYSTAL GROWTH, (19920502), vol. 120, no. 1 / 04, pages 275 - 278, XP000276711 [A] 7 * page 276, column 1, line 10 - line 15 * * page 277, column 1, line 13 - line 20 *

DOI:   http://dx.doi.org/10.1016/0022-0248(92)90402-5
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