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EP0867933
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EP About this file: EP0867933
| EP0867933 - Electrostatic chuck having a unidirectionally conducting coupler layer [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.12.2007 Database last updated on 24.08.2024 | Most recent event Tooltip | 14.12.2007 | Application deemed to be withdrawn | published on 16.01.2008 [2008/03] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue M/S 2061 Santa Clara, California 95054-3299 / US | [N/P] |
| Former [1998/40] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue, M/S 2061 Santa Clara, California 95054-3299 / US | Inventor(s) | 01 /
Kholodenko, Arnold 1747 Eucalyptus Drive San Francisco, California 94132 / US | 02 /
Veytser, Alexander M. 1429 Lloyd Way Mountain View, California 94040 / US | 03 /
Shamouilian, Shamouil 6536 Little Falls Drive San Jose, California 95120 / US | [1998/40] | Representative(s) | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [1998/40] | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT, 27 Furnival Street London EC4A 1PQ / GB | Application number, filing date | 98301298.0 | 23.02.1998 | [1998/40] | Priority number, date | US19970829711 | 28.03.1997 Original published format: US 829711 | [1998/40] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0867933 | Date: | 30.09.1998 | Language: | EN | [1998/40] | Type: | A3 Search report | No.: | EP0867933 | Date: | 15.03.2000 | [2000/11] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.01.2000 | Classification | IPC: | H01L21/68, H02N13/00 | [2007/08] | CPC: |
C23C16/45521 (EP,US);
C23C16/4586 (EP,US);
H01L21/68 (KR);
H01L21/6831 (EP,US);
H01L21/6833 (EP,US);
H02N13/00 (EP,US);
Y10T279/23 (EP,US)
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| Former IPC [1998/40] | H01L21/68 | Designated contracting states | DE, FR, GB, IT, NL [2000/47] |
| Former [1998/40] | AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Elektrostatischer Scheibenhalter mit einer unidirektionalen leitfähigen Kopplerschicht | [1998/40] | English: | Electrostatic chuck having a unidirectionally conducting coupler layer | [1998/40] | French: | Mandrin électrostatique à couche de couplage, unidirectionnellement conductrice | [2007/17] |
| Former [1998/40] | Mandrin électrostatique à couche coupleur conductrice dans une direction | Examination procedure | 14.09.2000 | Examination requested [2000/46] | 02.02.2007 | Communication of intention to grant the patent | 13.06.2007 | Application deemed to be withdrawn, date of legal effect [2008/03] | 18.07.2007 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2008/03] | Fees paid | Renewal fee | 14.02.2000 | Renewal fee patent year 03 | 11.12.2000 | Renewal fee patent year 04 | 15.02.2002 | Renewal fee patent year 05 | 17.02.2003 | Renewal fee patent year 06 | 04.02.2004 | Renewal fee patent year 07 | 04.02.2005 | Renewal fee patent year 08 | 06.02.2006 | Renewal fee patent year 09 | 05.02.2007 | Renewal fee patent year 10 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPH07161803 (TOKYO ELECTRON LTD, et al) [A] 1-10; | US5625526 [ ] (WATANABE MASAHIDE [JP], et al) [ ] * column 8, line 47 - line 63; figure 3 *; | [A]EP0725426 (APPLIED MATERIALS INC [US]) [A] 1-10 * column 16, line 3 - column 17, line 6; figures 4,5A,5B *; | [A]US5250137 (ARAMI JUNICHI [JP], et al) [A] 1-10 * column 5, line 45 - column 6, line 17; figures 2,3 *; | [A]US5348497 (NITESCU PETRU N [US]) [A] 1-10 * the whole document *; | [A]US5255153 (NOZAWA TOSHIHISA [JP], et al) [A] 1-10 * the whole document *; | [A]EP0329314 (RAYCHEM LTD [GB]) [A] 1-10 * the whole document * |