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Extract from the Register of European Patents

EP About this file: EP0887706

EP0887706 - Resist composition containing specific cross-linking agent [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  30.04.2010
Database last updated on 02.09.2024
Most recent event   Tooltip30.04.2010Application deemed to be withdrawnpublished on 02.06.2010  [2010/22]
Applicant(s)For all designated states
WAKO PURE CHEMICAL INDUSTRIES, LTD
1-2 Doshomachi-3-chome Chuo-ku
Osaka / JP
For all designated states
Panasonic Corporation
1006, Oaza Kadoma
Kadoma-shi
Osaka 571-8501 / JP
[N/P]
Former [2008/47]For all designated states
WAKO PURE CHEMICAL INDUSTRIES, LTD
1-2 Doshomachi-3-chome
Chuo-ku Osaka / JP
For all designated states
Panasonic Corporation
1006, Oaza Kadoma Kadoma-shi
Osaka 571-8501 / JP
Former [2001/29]For all designated states
WAKO PURE CHEMICAL INDUSTRIES, LTD
1-2 Doshomachi-3-chome
Chuo-ku Osaka / JP
For all designated states
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, Oaza-Kadoma
Kadoma-shi, Osaka 571-8501 / JP
Former [1999/01]For all designated states
WAKO PURE CHEMICAL INDUSTRIES, LTD
1-2 Doshomachi-3-chome
Chuo-ku Osaka / JP
For all designated states
MATSUSHITA ELECTRONICS CORPORATION
1-1, Saiwai-cho
Takatsuki-shi, Osaka 569 / JP
Inventor(s)01 / Sumino, Motoshige
Tokyo Kenkyusho, Wako Pure Chem. Ind. Ltd.
1633, Oaza Matoba, Kawagoe-shi / JP
02 / Fujie, Hirotoshi
Tokyo Kenkyusho, Wako Pure Chem. Ind. Ltd.
1633, Oaza Matoba, Kawagoe-shi / JP
03 / Katsuyama, Akiko
c/o Matsushita Elec. Corp., 1-1, Saiwaicho
Takatsuki-shi / JP
04 / Endo, Masayuki
13-30, Kurodoricho 1-chome
Izumi-shi, Osaka / JP
[1999/08]
Former [1999/01]01 / Sumino, Motoshige
Tokyo Kenkyusho, Wako Pure Chem. Ind. Ltd.
1633, Oaza Matoba, Kawagoe-shi / JP
02 / Fujie, Hirotoshi
Tokyo Kenkyusho, Wako Pure Chem. Ind. Ltd.
1633, Oaza Matoba, Kawagoe-shi / JP
03 / Katsuyama, Akiko
c/o Matsushita Elec. Corp., 1-1, Saiwaicho
Takatsuki-shi / JP
04 / Endo, Masayuki
c/o Matsushita Elec. Corp., 1-1, Saiwaicho
Takatsuki-shi / JP
Representative(s)Ebner von Eschenbach, Jennifer
Ladas & Parry LLP
Dachauerstrasse 37
80335 München / DE
[N/P]
Former [2001/20]Ebner von Eschenbach, Jennifer
c/o Ladas & Parry, Dachauerstrasse 37
80335 München / DE
Former [1999/01]Baillie, Iain Cameron
Langner Parry, 52-54 High Holborn
London WC1V 6RR / GB
Application number, filing date98304859.619.06.1998
[1999/01]
Priority number, dateJP1997018436525.06.1997         Original published format: JP 18436597
[1999/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0887706
Date:30.12.1998
Language:EN
[1998/53]
Search report(s)(Supplementary) European search report - dispatched on:EP13.10.1998
ClassificationIPC:G03F7/038
[1999/01]
CPC:
G03F7/038 (EP,KR,US); G03F7/0382 (KR); C09K19/542 (KR);
G03F7/0045 (EP,KR,US); G03F7/0046 (KR); G03F7/0397 (KR);
G03F7/095 (KR) (-)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [1999/01]
TitleGerman:Spezifisches Vernetzungsmittel enthaltende Resistzusammensetzung[1999/01]
English:Resist composition containing specific cross-linking agent[1999/01]
French:Composition pour photoréserve contenant un agent réticulant spécifique[1999/01]
Examination procedure17.05.1999Examination requested  [1999/28]
17.10.2000Despatch of a communication from the examining division (Time limit: M04)
21.02.2001Reply to a communication from the examining division
16.04.2002Despatch of a communication from the examining division (Time limit: M06)
23.10.2002Reply to a communication from the examining division
14.11.2003Despatch of a communication from the examining division (Time limit: M04)
15.03.2004Reply to a communication from the examining division
13.07.2009Despatch of a communication from the examining division (Time limit: M04)
24.11.2009Application deemed to be withdrawn, date of legal effect  [2010/22]
05.01.2010Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2010/22]
Fees paidRenewal fee
22.05.2000Renewal fee patent year 03
09.06.2001Renewal fee patent year 04
29.05.2002Renewal fee patent year 05
07.06.2003Renewal fee patent year 06
26.06.2004Renewal fee patent year 07
23.05.2005Renewal fee patent year 08
23.03.2006Renewal fee patent year 09
18.04.2007Renewal fee patent year 10
27.03.2008Renewal fee patent year 11
Penalty fee
Additional fee for renewal fee
30.06.200912   M06   Not yet paid
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Documents cited:Search[X]GB832565  (UNION CARBIDE CORP) [X] 6-8,10-12 * page 3; example 2 *;
 [X]US3264230  (PROOPS WILLIAM R) [X] 6-8,10-12 * column 15, Epoxide F *;
 [X]US4291114  (BERGGREN WILLIAM R, et al) [X] 1,2,6,7 * column 17 - column 18; examples 5-9; table 2 *;
 [X]EP0262414  (UNION CARBIDE CORP [US]) [X] 6,7 * page 6, line 16 - line 50 ** page 31; example 10 *;
 [X]EP0509512  (NIPPON PAINT CO LTD [JP]) [X] 1,6-11 * page 4, line 1 - line 11 * * page 5, line 55 - line 58 * * page 8; example 7; table 1 *;
 [X]EP0605361  (CIBA GEIGY AG [CH]) [X] 1,2,6,7 * page 9, line 13 * * page 11; example 6 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.