EP0926706 - Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate manufacturing method [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 14.04.2006 Database last updated on 03.09.2024 | Most recent event Tooltip | 14.04.2006 | Withdrawal of application | published on 31.05.2006 [2006/22] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | [N/P] |
Former [1999/26] | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | Inventor(s) | 01 /
Takisawa, Toru Canon Kabushiki Kaisha, 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo / JP | 02 /
Yonehara, Takao Canon Kabushiki Kaisha, 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo / JP | 03 /
Yamagata, Kenji Canon Kabushiki Kaisha, 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo / JP | [1999/26] | Representative(s) | Beresford, Keith Denis Lewis, et al Beresford Crump LLP 16 High Holborn London WC1V 6BX / GB | [N/P] |
Former [1999/26] | Beresford, Keith Denis Lewis, et al BERESFORD & Co. 2-5 Warwick Court High Holborn London WC1R 5DJ / GB | Application number, filing date | 98310414.2 | 18.12.1998 | [1999/26] | Priority number, date | JP19970361011 | 26.12.1997 Original published format: JP 36101197 | JP19970361010 | 26.12.1997 Original published format: JP 36101097 | [1999/26] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0926706 | Date: | 30.06.1999 | Language: | EN | [1999/26] | Type: | A3 Search report | No.: | EP0926706 | Date: | 06.02.2002 | [2002/06] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 19.12.2001 | Classification | IPC: | H01L21/00 | [1999/26] | CPC: |
H01L21/67092 (EP,US);
H01L21/68 (KR);
H01L21/6838 (EP,US)
| Designated contracting states | AT, BE, DE, ES, FR, GB, IT, NL, SE [2002/43] |
Former [1999/26] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Substratverarbeitungsvorrichtung, Substratträgervorrichtung, Substratverarbeitungsverfahren und Substratherstellungsverfahren | [1999/26] | English: | Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate manufacturing method | [1999/26] | French: | Appareil de traitement de substrats, support pour substrats, méthode de traitement de substrats et méthode de fabrication de substrats | [1999/26] | Examination procedure | 28.06.2002 | Examination requested [2002/35] | 01.12.2004 | Despatch of a communication from the examining division (Time limit: M04) | 01.04.2005 | Reply to a communication from the examining division | 21.03.2006 | Despatch of a communication from the examining division (Time limit: M04) | 07.04.2006 | Application withdrawn by applicant [2006/22] | Fees paid | Renewal fee | 21.12.2000 | Renewal fee patent year 03 | 19.12.2001 | Renewal fee patent year 04 | 19.12.2002 | Renewal fee patent year 05 | 22.12.2003 | Renewal fee patent year 06 | 20.12.2004 | Renewal fee patent year 07 | 02.01.2006 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY]US5273553 (HOSHI TADAHIDE [JP], et al) [X] 1-28,58 * abstract * * column 1, line 45 - column 2, line 34 * * column 3, line 8 - column 6, line 66 * [Y] 47-55; | [X]EP0256150 (TOSHIBA KK [JP]) [X] 1-28,58 * abstract * * column 2, line 29 - column 3, line 8 *; | [A]US5534073 (KINOSHITA YOSHIMI [JP], et al) [A] 1-24 * abstract * * column 21, line 55 - column 24, line 55 *; | [EL]EP0899778 (CANON KK [JP]) [EL] 1-28,58 * page -; figure -; claims 28,29 * * column 9, line 8 - column 16, line 22 * * (L: Priority) *; | [XY]US4551192 (DI MILIA VINCENT [US], et al) [X] 29-46,56,57 * the whole document * [Y] 47-55; | [X]GB2149697 (VARIAN ASSOCIATES) [X] 29-34,56,57 * the whole document *; | [A]US5564682 (TSUJI HITOSHI [JP]) [A] 29-57 * abstract * |