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EP0968458
European procedure
Extract from the Register of European Patents
EP About this file: EP0968458
| EP0968458 - OPTICAL PROXIMITY CORRECTION METHOD FOR INTERMEDIATE-PITCH FEATURES USING SUB-RESOLUTION SCATTERING BARS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 29.05.2009 Database last updated on 10.05.2025 | Most recent event Tooltip | 10.06.2011 | Lapse of the patent in a contracting state | published on 13.07.2011 [2011/28] | Applicant(s) | For all designated states ASML MaskTools B.V. De Run 6501 5504 DR Veldhoven / NL | [2004/39] |
| Former [2002/34] | For all designated states ASML Masktools B.V. De Run 1110 5503 LA Veldhoven / NL | ||
| Former [2002/27] | For all designated states ASML Masktools Netherlands B.V. De Run 1110 5503 LA Veldhoven / NL | ||
| Former [2000/06] | For all designated states ASM LITHOGRAPHY HOLDING N.V. De Run 1110 5503 LA Veldhoven / NL | ||
| Former [2000/01] | For all designated states ASM LITHOGRAPHY B.V. De Run 1110 5503 LA Veldhoven / NL | Inventor(s) | 01 /
CHEN, Jang, Fung 11752 Pine Brook Lane Cupertino, CA 95014 / US | 02 /
WAMPLER, Kurt, E. 1098 Cascade Drive Sunnyvale, CA 94087 / US | 03 /
LAIDIG, Thomas, L. 201 Cottage Avenue Pt. Richmond, CA 94801 / US | [2000/01] | Representative(s) | van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2009/14] | Van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2002/27] | Leeming, John Gerard, et al J.A. Kemp & Co., 14 South Square, Gray's Inn London WC1R 5JJ / GB | ||
| Former [2000/01] | DIEHL GLAESER HILTL & PARTNER Patentanwälte Augustenstrasse 46 80333 München / DE | Application number, filing date | 98908466.0 | 20.02.1998 | [2000/01] | WO1998US02100 | Priority number, date | US19970808587 | 28.02.1997 Original published format: US 808587 | [2000/01] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9838549 | Date: | 03.09.1998 | Language: | EN | [1998/35] | Type: | A1 Application with search report | No.: | EP0968458 | Date: | 05.01.2000 | Language: | EN | The application published by WIPO in one of the EPO official languages on 03.09.1998 takes the place of the publication of the European patent application. | [2000/01] | Type: | B1 Patent specification | No.: | EP0968458 | Date: | 23.07.2008 | Language: | EN | [2008/30] | Search report(s) | International search report - published on: | US | 03.09.1998 | (Supplementary) European search report - dispatched on: | EP | 19.03.2001 | Classification | IPC: | G03C5/00, G03F9/00, G03F1/14 | [2001/18] | CPC: |
G03F7/70125 (EP,US);
G03F9/00 (KR);
G03F1/36 (EP,US);
G03F7/70441 (EP,US)
|
| Former IPC [2000/01] | G03C5/00, G03F9/00 | Designated contracting states | DE, FR, GB, IT, NL [2000/01] | Title | German: | KORREKTUR DES PROXIMITY EFFEKTS (NAHEFFEKTS) BEI MUSTERN MIT MITTLEREM ABSTAND MITTELS NICHT AUFGELÖSTER HILFSSTRUKTUREN | [2008/07] | English: | OPTICAL PROXIMITY CORRECTION METHOD FOR INTERMEDIATE-PITCH FEATURES USING SUB-RESOLUTION SCATTERING BARS | [2000/01] | French: | PROCEDE DE CORRECTION DE LA PROXIMITE OPTIQUE D'ENTITES A PAS INTERMEDIAIRE A L'AIDE DE BARRES DE DIFFRACTION INFRA-RESOLUTION | [2008/07] |
| Former [2000/01] | KORREKTUR DES PROXIMITY EFFEKTS (NAHEFFEKTS) BEI MUSTERN MIT MITTLEREN ABSTAND MITTELS NICHT AUFGELÖSTER HILFSSTRUKTUREN | ||
| Former [2000/01] | PROCEDE DE CORRECTION DE LA PROXIMITE OPTIQUE D'ENTITES A PAS INTERMEDIAIRE A L'AIDE DE BARRES DE DIFFUSION INFRA-RESOLUTION | Entry into regional phase | 28.09.1999 | National basic fee paid | 28.09.1999 | Search fee paid | 28.09.1999 | Designation fee(s) paid | 28.09.1999 | Examination fee paid | Examination procedure | 15.07.1998 | Request for preliminary examination filed International Preliminary Examining Authority: US | 28.09.1999 | Examination requested [2000/01] | 28.11.2003 | Despatch of a communication from the examining division (Time limit: M06) | 01.06.2004 | Reply to a communication from the examining division | 25.08.2004 | Despatch of a communication from the examining division (Time limit: M04) | 31.12.2004 | Reply to a communication from the examining division | 11.11.2005 | Despatch of a communication from the examining division (Time limit: M06) | 04.05.2006 | Reply to a communication from the examining division | 10.01.2008 | Cancellation of oral proceeding that was planned for 24.01.2008 | 10.01.2008 | Minutes of oral proceedings despatched | 24.01.2008 | Date of oral proceedings | 24.01.2008 | Date of oral proceedings (cancelled) | 22.02.2008 | Communication of intention to grant the patent | 05.06.2008 | Fee for grant paid | 05.06.2008 | Fee for publishing/printing paid | Opposition(s) | 24.04.2009 | No opposition filed within time limit [2009/27] | Fees paid | Renewal fee | 11.02.2000 | Renewal fee patent year 03 | 15.02.2001 | Renewal fee patent year 04 | 13.02.2002 | Renewal fee patent year 05 | 25.02.2003 | Renewal fee patent year 06 | 30.01.2004 | Renewal fee patent year 07 | 08.02.2005 | Renewal fee patent year 08 | 15.02.2006 | Renewal fee patent year 09 | 13.02.2007 | Renewal fee patent year 10 | 14.02.2008 | Renewal fee patent year 11 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 20.02.2009 | [2011/28] | Documents cited: | Search | [X]US5439765 (NOZUE HIROSHI [JP]) [X] 1,8,16 * column 3, line 43 - line 68; figure 7; claims 1-4 *; | [A]GB2291982 (HYUNDAI ELECTRONICS IND [KR]) [A] 1,8,16 * claims 1-4 *; | [A]US5496666 (CHU RON-FU [SG], et al) [A] 1,8,16 * claims 1-20 *; | [X]US5587834 (NOGUCHI MIYOKO [JP]) [X] 1,8,16 * claims 1-4 *; | [A] - OTTO O W, KOSTELAK R L. VAIDYA S, VASUDEV P K, "Automated optical proximity correction - a rules based approach", PROCEEDINGS OF THE SPIE, San Jose USA, (19940302), vol. 2197, pages 278 - 293, XP000989989 [A] 1,8,16 * page 278, paragraph 1 - page 292, paragraph 4 * DOI: http://dx.doi.org/10.1117/12.175422 | International search | [A]US5242770 (CHEN JANG F [US], et al) |