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EP0980364
European procedure
Extract from the Register of European Patents
EP Citations: EP0980364
| Cited in | International search | Type: | Patent literature | Publication No.: | JPH0261640
[ ] (TOSHIBA CORP); | Type: | Non-patent literature | Publication information: | [AP] - C.G.WILSON ET AL., "NON-CHEMICALLY AMPLIFIED 248NM RESIST MATERIALS.", PROC.SPIE-INT.SOC.OPT.ENG., USA, (19970310), vol. 3049, pages 226 - 237, XP002066509 [AP] 1 * page 226 - page 233 * | DOI: | http://dx.doi.org/10.1117/12.275821 | Type: | Non-patent literature | Publication information: | [A] - CHEMICAL ABSTRACTS, (1990), vol. 113, no. 74, Database accession no. 68407v, page 621, XP002066511 [A] * abstract * |