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EP0990251
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EP About this file: EP0990251
| EP0990251 - CENTRAL COIL DESIGN FOR IONIZED METAL PLASMA DEPOSITION [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 08.08.2003 Database last updated on 01.01.2025 | Most recent event Tooltip | 08.08.2003 | Application deemed to be withdrawn | published on 24.09.2003 [2003/39] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2000/14] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
HONG, Liubo 945 Summerleaf Place San Jose, CA 91520 / US | 02 /
WANG, Hougong 7821 Lafayette Ct. Pleasanton, CA 94588 / US | 03 /
YAO, Gongda 44875 Winding Lane Fremont, CA 94539 / US | 04 /
XU, Zheng 279 Hudson Bay Street Foster City, CA 94404 / US | [2000/35] |
| Former [2000/14] | 01 /
HONG, Liubo 945 Summerleaf Place San Jose, CA 91520 / US | ||
| 02 /
WANG, Hougong 20990 Valley Green Drive 718 Cupertino, CA 95014 / US | |||
| 03 /
YAO, Gongda 44875 Winding Lane Fremont, CA 94539 / US | |||
| 04 /
XU, Zheng 279 Hudson Bay Street Foster City, CA 94404 / US | Representative(s) | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2000/14] | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT, 27 Furnival Street London EC4A 1PQ / GB | Application number, filing date | 98922371.4 | 13.05.1998 | [2000/14] | WO1998US10058 | Priority number, date | US19970857719 | 16.05.1997 Original published format: US 857719 | [2000/14] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO9852207 | Date: | 19.11.1998 | Language: | EN | [1998/46] | Type: | A2 Application without search report | No.: | EP0990251 | Date: | 05.04.2000 | Language: | EN | The application published by WIPO in one of the EPO official languages on 19.11.1998 takes the place of the publication of the European patent application. | [2000/14] | Search report(s) | International search report - published on: | EP | 11.02.1999 | Classification | IPC: | H01J37/00 | [2000/14] | CPC: |
H01J37/321 (EP,US);
H01J37/34 (EP,KR,US);
H01J2237/3323 (EP,US)
| Designated contracting states | DE, FR, GB [2000/15] |
| Former [2000/14] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | AUSFÜHRUNG DER ZENTRALSPULE FÜR DIE BESCHICHTUNG MITTELS IONISIERTEN METALLPLASMA | [2000/14] | English: | CENTRAL COIL DESIGN FOR IONIZED METAL PLASMA DEPOSITION | [2000/14] | French: | CONFIGURATION D'ENROULEMENT CENTRAL POUR DEPOT EN PHASE VAPEUR ACTIVE PAR PLASMA DE METAL IONISE | [2000/14] | Entry into regional phase | 23.11.1999 | National basic fee paid | 23.11.1999 | Designation fee(s) paid | 23.11.1999 | Examination fee paid | Examination procedure | 11.12.1998 | Request for preliminary examination filed International Preliminary Examining Authority: US | 23.11.1999 | Examination requested [2000/14] | 04.11.2002 | Despatch of a communication from the examining division (Time limit: M04) | 15.03.2003 | Application deemed to be withdrawn, date of legal effect [2003/39] | 23.04.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2003/39] | Fees paid | Renewal fee | 17.04.2000 | Renewal fee patent year 03 | 18.05.2001 | Renewal fee patent year 04 | 06.05.2002 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.05.2003 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]EP0653776 (APPLIED MATERIALS INC [US]) [Y] 1,2,26,28-30 * column 4, line 10 - column 6, line 51; figure 1 *; | [YA]US5231334 (PARANJPE AJIT P [US]) [Y] 1,2,26,28-30 * column 2, line 63 - line 68 * * column 3, line 20 - column 4, line 46; figure - * [A] 15-18,31-34; | [A]EP0758148 (APPLIED MATERIALS INC [US]) [A] 1,2,15,19,26-31,35 * column 14, line 20 - line 54; figure 2 *; | [A]EP0727923 (APPLIED MATERIALS INC [US]) [A] 1,2,26,28-30; | [A]US5401350 (PATRICK ROGER [US], et al) [A] 1,2,15-18,26,28-34 * column W * |