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Extract from the Register of European Patents

EP About this file: EP1044454

EP1044454 - COLLIMATOR FOR X-RAY PROXIMITY LITHOGRAPHY [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  27.05.2005
Database last updated on 14.09.2024
Most recent event   Tooltip27.05.2005Withdrawal of applicationpublished on 13.07.2005  [2005/28]
Applicant(s)For all designated states
Focused X-Rays LLC
4323 North 30th Street
Boulder, CO 80301-1643 / US
[2000/42]
Inventor(s)01 / CASH, Webster, C., Jr.
4323 North 30th Street
Boulder, CO 80301 / US
[2000/42]
Representative(s)Knott, Stephen Gilbert, et al
Mathisen & Macara LLP
Communications House
South Street
Staines-upon-Thames
Middlesex, TW18 4PR / GB
[N/P]
Former [2000/42]Knott, Stephen Gilbert, et al
MATHISEN, MACARA & CO. The Coach House 6-8 Swakeleys Road
Ickenham Uxbridge UB10 8BZ / GB
Application number, filing date98959537.620.11.1998
[2000/42]
WO1998US24841
Priority number, dateUS19970066510P24.11.1997         Original published format: US 66510 P
[2000/42]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9927542
Date:03.06.1999
Language:EN
[1999/22]
Type: A1 Application with search report 
No.:EP1044454
Date:18.10.2000
Language:EN
The application published by WIPO in one of the EPO official languages on 03.06.1999 takes the place of the publication of the European patent application.
[2000/42]
Search report(s)International search report - published on:US03.06.1999
ClassificationIPC:G21K1/06
[2000/42]
CPC:
B82Y10/00 (EP,US); G03F7/70166 (EP,US); G03F7/7035 (EP,US);
G21K1/06 (EP,US)
Designated contracting statesDE,   FR,   GB,   NL [2000/42]
TitleGerman:KOLLIMATOR FÜR RÖNTGENSTRAHLUNGEN-NÄHE-LITHOGRAPHIE[2000/42]
English:COLLIMATOR FOR X-RAY PROXIMITY LITHOGRAPHY[2000/42]
French:COLLIMATEUR POUR LITHOGRAPHIE DE PROXIMITE AUX RAYONS X[2000/42]
Entry into regional phase23.06.2000National basic fee paid 
23.06.2000Search fee paid 
23.06.2000Designation fee(s) paid 
23.06.2000Examination fee paid 
Examination procedure08.06.1999Request for preliminary examination filed
International Preliminary Examining Authority: US
23.06.2000Examination requested  [2000/42]
18.05.2005Application withdrawn by applicant  [2005/28]
Fees paidRenewal fee
13.11.2000Renewal fee patent year 03
14.11.2001Renewal fee patent year 04
27.11.2002Renewal fee patent year 05
12.11.2003Renewal fee patent year 06
Penalty fee
Additional fee for renewal fee
30.11.200407   M06   Not yet paid
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Cited inInternational search[Y]US5339346  (WHITE DONALD L [US]);
 [A]US5604782  (CASH JR WEBSTER C [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.