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Extract from the Register of European Patents

EP About this file: EP1044074

EP1044074 - PHOTORESIST COATING PROCESS CONTROL WITH SOLVENT VAPOR SENSOR [Right-click to bookmark this link]
Former [2000/42]PHOTORESIST COATING PROCESS CONTROL WITH SOLENT VAPOR SENSOR
[2007/25]
StatusNo opposition filed within time limit
Status updated on  25.04.2008
Database last updated on 20.09.2024
Most recent event   Tooltip08.01.2010Lapse of the patent in a contracting state
New state(s): CY, LU		published on 10.02.2010  [2010/06]
Applicant(s)For all designated states
ASML Holding N.V.
De Run 6501
5504 DR Veldhoven / NL
[N/P]
Former [2007/27]For all designated states
ASML Holding N.V.
De Run 6501
5504 DR Veldhoven / NL
Former [2007/19]For all designated states
ASML Holding N.V.
De Run 1110
5503 LA Veldhoven / NL
Former [2007/18]For all designated states
ASML US, Inc.
8555 South River Parkway
Tempe AZ 85284 / US
Former [2000/42]For all designated states
Silicon Valley Group, Inc.
2240 Ringwood Avenue
San Jose, CA 95110 / US
Inventor(s)01 / Gurer, Emir
709 Coast Range Drive
Scotts Valley, CA 95066 / US
02 / Litvak, Herbert
790 Lodgewood Court
San Jose, CA 95120 / US
03 / Savage, Richard
5 Fox Sparrow Court
Scotts Valley, CA 95066 / US
[2000/42]
Representative(s)McGowan, Cathrine
D Young & Co LLP
120 Holborn
London EC1N 2DY / GB
[N/P]
Former [2004/40]McGowan, Cathrine
D Young & Co, 21 New Fetter Lane
London EC4A 1DA / GB
Former [2000/42]Potter, Julian Mark, et al
D. Young & Co., 21 New Fetter Lane
London EC4A 1DA / GB
Application number, filing date98967092.208.12.1998
[2000/42]
WO1998US26143
Priority number, dateUS1997098717908.12.1997         Original published format: US 987179
[2000/42]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9929439
Date:17.06.1999
Language:EN
[1999/24]
Type: A1 Application with search report 
No.:EP1044074
Date:18.10.2000
Language:EN
The application published by WIPO in one of the EPO official languages on 17.06.1999 takes the place of the publication of the European patent application.
[2000/42]
Type: B1 Patent specification 
No.:EP1044074
Date:20.06.2007
Language:EN
[2007/25]
Type: B8 Corrected title page of specification 
No.:EP1044074
Date:08.08.2007
[2007/32]
Search report(s)International search report - published on:US17.06.1999
(Supplementary) European search report - dispatched on:EP12.01.2006
ClassificationIPC:B05D3/12, B05D3/02, B05D3/10, H01L21/469, B05C11/00, B05C11/02, C23C16/00
[2000/42]
CPC:
B05D1/005 (EP,KR,US); B05C11/08 (EP,KR,US); B05D3/0486 (EP,KR,US);
G03F7/162 (EP,KR,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2000/42]
TitleGerman:VERFAHRENSREGELUNG FÜR PHOTORESISTENTE BESCHICHTUNG MIT SOLVENTDAMPFSENSOR[2007/25]
English:PHOTORESIST COATING PROCESS CONTROL WITH SOLVENT VAPOR SENSOR[2007/25]
French:COMMANDE DE PROCESSUS D'APPLICATION DE PHOTORESIST A DETECTEUR DE VAPEUR DE SOLVANT[2000/42]
Former [2000/42]VERFAHRENSREGELUNG FÜR PHOTORESISTENTE BESCHICHTUNG MITSOLVENTDAMPFSENSOR
Former [2000/42]PHOTORESIST COATING PROCESS CONTROL WITH SOLENT VAPOR SENSOR
Entry into regional phase03.07.2000National basic fee paid 
03.07.2000Search fee paid 
03.07.2000Designation fee(s) paid 
03.07.2000Examination fee paid 
Examination procedure07.07.1999Request for preliminary examination filed
International Preliminary Examining Authority: US
03.07.2000Amendment by applicant (claims and/or description)
03.07.2000Examination requested  [2000/42]
22.06.2006Despatch of a communication from the examining division (Time limit: M02)
18.08.2006Reply to a communication from the examining division
03.01.2007Communication of intention to grant the patent
16.04.2007Fee for grant paid
16.04.2007Fee for publishing/printing paid
Divisional application(s)EP07007848.0  / EP1847328
Opposition(s)25.03.2008No opposition filed within time limit [2008/22]
Fees paidRenewal fee
20.11.2000Renewal fee patent year 03
31.12.2001Renewal fee patent year 04
23.12.2002Renewal fee patent year 05
29.12.2003Renewal fee patent year 06
23.12.2004Renewal fee patent year 07
27.12.2005Renewal fee patent year 08
12.12.2006Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT20.06.2007
BE20.06.2007
CH20.06.2007
CY20.06.2007
DK20.06.2007
FI20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
LU08.12.2007
IE10.12.2007
MC31.12.2007
[2010/06]
Former [2009/15]AT20.06.2007
BE20.06.2007
CH20.06.2007
DK20.06.2007
FI20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
IE10.12.2007
MC31.12.2007
Former [2008/48]AT20.06.2007
BE20.06.2007
CH20.06.2007
DK20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
IE10.12.2007
MC31.12.2007
Former [2008/33]AT20.06.2007
BE20.06.2007
CH20.06.2007
DK20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
MC31.12.2007
Former [2008/23]AT20.06.2007
BE20.06.2007
CH20.06.2007
DK20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
Former [2008/21]AT20.06.2007
BE20.06.2007
CH20.06.2007
LI20.06.2007
SE20.09.2007
GR21.09.2007
ES01.10.2007
PT20.11.2007
Former [2008/16]AT20.06.2007
BE20.06.2007
CH20.06.2007
LI20.06.2007
SE20.09.2007
ES01.10.2007
PT20.11.2007
Documents cited:Search[A]US5095848  (IKENO MASAHIKO [JP]) [A] 1,16 * the whole document *;
 [A]GB2277892  (FUJITSU LTD [JP]) [A] 1,16* the whole document *;
 [A]US5571560  (LIN BURN J [US]) [A] 1,16 * the whole document *;
 [A]US5670210  (MANDAL ROBERT P [US], et al) [A] 1,16 * the whole document *;
 [A]EP0810478  (APPLIED MATERIALS INC [US]) [A] 1,16 * the whole document *
International search[A]US5417100  (MILLER LEROY J [US], et al);
 [A]US5670210  (MANDAL ROBERT P [US], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.