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Extract from the Register of European Patents

EP About this file: EP0939438

EP0939438 - Method for forming trench capacitors with doped portions in an integrated circuit [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  25.12.2009
Database last updated on 27.07.2024
Most recent event   Tooltip25.12.2009Application deemed to be withdrawnpublished on 27.01.2010  [2010/04]
Applicant(s)For all designated states
Infineon Technologies AG
St.-Martin-Strasse 53
81669 München / DE
[2005/26]
Former [1999/35]For all designated states
SIEMENS AKTIENGESELLSCHAFT
Wittelsbacherplatz 2
80333 München / DE
Inventor(s)01 / Hoepfner, Joachim
Magdalenenweg 5
82152 Planegg / DE
[1999/35]
Representative(s)Westphal, Mussgnug & Partner Patentanwälte mbB
Am Riettor 5
78048 Villingen-Schwenningen / DE
[N/P]
Former [1999/35]Patentanwälte Westphal, Mussgnug & Partner
Waldstrasse 33
78048 Villingen-Schwenningen / DE
Application number, filing date99101901.929.01.1999
[1999/35]
Priority number, dateUS1998003199527.02.1998         Original published format: US 31995
[1999/35]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0939438
Date:01.09.1999
Language:EN
[1999/35]
Type: A3 Search report 
No.:EP0939438
Date:28.11.2001
[2001/48]
Search report(s)(Supplementary) European search report - dispatched on:EP17.10.2001
ClassificationIPC:H01L21/8242, H01L21/223, H01L21/334
[1999/35]
CPC:
H01L29/66181 (EP,KR,US); H10B12/038 (EP,US)
Designated contracting statesDE,   FR,   GB,   IE [2002/33]
Former [1999/35]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Verfahren zur Herstellung von Grabenkondensatoren mit dotierten Bereichen in einem integrierten Schaltkreis[1999/35]
English:Method for forming trench capacitors with doped portions in an integrated circuit[1999/35]
French:Méthode de formation de condensateurs ensillonnés avec des régions dopées, dans un circuit intégré[1999/35]
Examination procedure24.04.2002Examination requested  [2002/26]
29.05.2002Loss of particular rights, legal effect: designated state(s)
18.09.2002Despatch of communication of loss of particular rights: designated state(s) AT, BE, CH, CY, DK, ES, FI, GR, IT, LU, MC, NL, PT, SE
10.10.2006Despatch of a communication from the examining division (Time limit: M06)
17.04.2007Reply to a communication from the examining division
01.09.2009Application deemed to be withdrawn, date of legal effect  [2010/04]
08.09.2009Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2010/04]
Fees paidRenewal fee
24.01.2001Renewal fee patent year 03
25.01.2002Renewal fee patent year 04
24.01.2003Renewal fee patent year 05
22.01.2004Renewal fee patent year 06
25.01.2005Renewal fee patent year 07
28.01.2006Renewal fee patent year 08
25.01.2007Renewal fee patent year 09
15.01.2008Renewal fee patent year 10
Penalty fee
Penalty fee Rule 85a EPC 1973
03.07.2002AT   M01   Not yet paid
03.07.2002BE   M01   Not yet paid
03.07.2002CH   M01   Not yet paid
03.07.2002CY   M01   Not yet paid
03.07.2002DK   M01   Not yet paid
03.07.2002ES   M01   Not yet paid
03.07.2002FI   M01   Not yet paid
03.07.2002GR   M01   Not yet paid
03.07.2002IT   M01   Not yet paid
03.07.2002LU   M01   Not yet paid
03.07.2002MC   M01   Not yet paid
03.07.2002NL   M01   Not yet paid
03.07.2002PT   M01   Not yet paid
03.07.2002SE   M01   Not yet paid
Additional fee for renewal fee
31.01.200911   M06   Not yet paid
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Documents cited:Search[A]US5432365  (CHIN DAE-JE [KR], et al);
 [Y]US5629226  (OHTSUKI SUMITO [JP]);
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.