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Extract from the Register of European Patents

EP About this file: EP0984486

EP0984486 - Combined preanneal/oxidation step using rapid thermal processing (RTP) [Right-click to bookmark this link]
StatusThe application has been refused
Status updated on  20.02.2009
Database last updated on 14.09.2024
Most recent event   Tooltip20.02.2009Refusal of applicationpublished on 25.03.2009  [2009/13]
Applicant(s)For all designated states
Infineon Technologies AG
St.-Martin-Strasse 53
81669 München / DE
[2004/26]
Former [2000/10]For all designated states
SIEMENS AKTIENGESELLSCHAFT
Wittelsbacherplatz 2
80333 München / DE
Inventor(s)01 / Tews, Helmut Horst
26 Millbank Road
Poughkeepsie, NY 12603 / US
02 / Schrems, Martin
Bruhmstrasse 4E/15
01465 Langebrück / DE
03 / Gärtner, Thomas
Lindenweg 11
01458 Ottendorf-Okrilla / DE
[2000/10]
Representative(s)Westphal, Mussgnug & Partner Patentanwälte mbB
Am Riettor 5
78048 Villingen-Schwenningen / DE
[N/P]
Former [2000/10]Patentanwälte Westphal, Mussgnug & Partner
Waldstrasse 33
78048 Villingen-Schwenningen / DE
Application number, filing date99115879.112.08.1999
[2000/10]
Priority number, dateUS1998014687003.09.1998         Original published format: US 146870
[2000/10]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0984486
Date:08.03.2000
Language:EN
[2000/10]
Type: A3 Search report 
No.:EP0984486
Date:19.04.2000
[2000/16]
Search report(s)(Supplementary) European search report - dispatched on:EP03.03.2000
ClassificationIPC:H01L21/316, H01L21/322
[2000/16]
CPC:
H01L21/324 (KR); H01L21/02238 (EP,US); H01L21/02255 (EP,US);
H01L21/31662 (US)
Former IPC [2000/10]H01L21/316
Designated contracting statesDE,   FR,   GB,   IE,   IT,   NL [2001/01]
Former [2000/10]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Kombinierter Preanneal/Oxidationsschritt unter Verwendung eines schnellen thermischen Prozesses (RTP)[2000/10]
English:Combined preanneal/oxidation step using rapid thermal processing (RTP)[2000/10]
French:Etape de prérecuit/oxidation combinée utilisant un traitement thermique rapide (RTP)[2000/10]
Examination procedure15.06.2000Examination requested  [2000/35]
05.10.2000Despatch of a communication from the examining division (Time limit: M06)
20.10.2000Loss of particular rights, legal effect: designated state(s)
02.02.2001Despatch of communication of loss of particular rights: designated state(s) AT, BE, CH, CY, DK, ES, FI, GR, LU, MC, PT, SE
02.02.2001Despatch of communication of loss of particular rights: designated state(s) LI
17.04.2001Reply to a communication from the examining division
29.01.2002Despatch of a communication from the examining division (Time limit: M06)
08.08.2002Reply to a communication from the examining division
30.03.2006Despatch of a communication from the examining division (Time limit: M04)
28.07.2006Reply to a communication from the examining division
27.10.2008Cancellation of oral proceeding that was planned for 12.12.2008
27.10.2008Minutes of oral proceedings despatched
03.11.2008Despatch of communication that the application is refused, reason: substantive examination [2009/13]
13.11.2008Application refused, date of legal effect [2009/13]
12.12.2008Date of oral proceedings
12.12.2008Date of oral proceedings (cancelled)
Fees paidRenewal fee
23.08.2001Renewal fee patent year 03
23.08.2002Renewal fee patent year 04
21.08.2003Renewal fee patent year 05
20.08.2004Renewal fee patent year 06
24.08.2005Renewal fee patent year 07
24.08.2006Renewal fee patent year 08
16.08.2007Renewal fee patent year 09
Penalty fee
Penalty fee Rule 85a EPC 1973
24.11.2000AT   M01   Not yet paid
24.11.2000BE   M01   Not yet paid
24.11.2000CH   M01   Not yet paid
24.11.2000CY   M01   Not yet paid
24.11.2000DK   M01   Not yet paid
24.11.2000ES   M01   Not yet paid
24.11.2000FI   M01   Not yet paid
24.11.2000GR   M01   Not yet paid
24.11.2000LU   M01   Not yet paid
24.11.2000MC   M01   Not yet paid
24.11.2000SE   M01   Not yet paid
Additional fee for renewal fee
31.08.200810   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]EP0214421  (SIEMENS AG [DE]) [X] 1,4* column 3, line 8 *;
 [DX]US5401669  (FALSTER ROBERT [IT], et al) [DX] 1,2,4-10 * column 2, line 59 - column 4, line 13; example 6 *;
 [X]US5502010  (NADAHARA SOUICHI [US], et al) [X] 1,2,4-10 * column 3, lines 31-36 * * column 7, lines 45-49 *;
 [DX]US5674756  (SATOH YUHKI [JP], et al) [DX] 1,2,4-9 * column 4, lines 40-44 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.