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EP1128219
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EP About this file: EP1128219
| EP1128219 - Exposure method and apparatus [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 01.08.2008 Database last updated on 24.08.2024 | Most recent event Tooltip | 01.08.2008 | Withdrawal of application | published on 03.09.2008 [2008/36] | Applicant(s) | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP | [N/P] |
| Former [2001/35] | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP | Inventor(s) | 01 /
Shiraishi, Naomasa No. 302, M-Corp Urawa, 11-11, Higashinakacho Urawa-shi, Saitama, 336 / JP | [2001/35] | Representative(s) | Pust, Detlev A.W. Hoffmann Eitle Patent- und Rechtsanwälte Postfach 81 04 20 81904 München / DE | [N/P] |
| Former [2002/05] | Pust, Detlev A.W., Dr. Dipl.-Phys. Hoffmann Eitle, Patent- und Rechtsanwälte, Postfach 81 04 20 81904 München / DE | ||
| Former [2001/35] | Bergen, Klaus, Dipl.-Ing. Patentanwalt Alt-Niederkassel 75 40547 Düsseldorf / DE | Application number, filing date | 99119473.9 | 19.08.1991 | [2001/35] | Priority number, date | JP19900218030 | 21.08.1990 Original published format: JP 21803090 | [2001/35] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1128219 | Date: | 29.08.2001 | Language: | EN | [2001/35] | Type: | A3 Search report | No.: | EP1128219 | Date: | 14.05.2003 | [2003/20] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.03.2003 | Classification | IPC: | G03F7/20 | [2001/35] | CPC: |
G03F9/7088 (EP,US);
G03F7/201 (EP,US);
G03F7/701 (EP,US);
G03F7/70241 (EP,US);
G03F7/7025 (EP,US);
G03F7/70308 (EP,US)
| Designated contracting states | DE, GB [2004/06] |
| Former [2001/35] | DE, GB | Title | German: | Belichtungsverfahren und -apparat | [2001/35] | English: | Exposure method and apparatus | [2001/35] | French: | Méthode et appareil d' exposition | [2001/35] | Examination procedure | 16.12.1999 | Despatch of communication that the application is deemed to be withdrawn, reason: divisional application deemed not to have been fil | 17.02.2000 | Request for decision received: (all rights) | 25.08.2000 | Result of request for decision ((all rights)): Request rejected | 06.11.2003 | Examination requested [2004/02] | 23.07.2008 | Application withdrawn by applicant [2008/36] | Appeal following examination | 27.10.2000 | Appeal received | 28.12.2000 | Statement of grounds filed | 07.03.2001 | Interlocutory revision of appeal | Fees paid | Renewal fee | 21.10.1999 | Renewal fee patent year 03 | 21.10.1999 | Renewal fee patent year 04 | 21.10.1999 | Renewal fee patent year 05 | 21.10.1999 | Renewal fee patent year 06 | 21.10.1999 | Renewal fee patent year 07 | 21.10.1999 | Renewal fee patent year 08 | 21.10.1999 | Renewal fee patent year 09 | 22.08.2000 | Renewal fee patent year 10 | 18.08.2001 | Renewal fee patent year 11 | 29.08.2002 | Renewal fee patent year 12 | 21.08.2003 | Renewal fee patent year 13 | 24.08.2004 | Renewal fee patent year 14 | 25.08.2005 | Renewal fee patent year 15 | 17.08.2006 | Renewal fee patent year 16 | 28.08.2007 | Renewal fee patent year 17 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [DA]EP0352975 (AMERICAN TELEPHONE & TELEGRAPH [US]) [DA] 1,14 * page 4, line 1 - page 9, line 33 * * figure - *; | [DA]US4931830 (SUWA KYOICHI [JP], et al) [DA] 1,14 * column 3, line 14 - line 50 * * figure 1 * |