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EP1001455
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EP About this file: EP1001455
| EP1001455 - Apparatus for protecting a substrate support surface and method of fabricating same [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 17.10.2003 Database last updated on 09.07.2024 | Most recent event Tooltip | 17.10.2003 | Application deemed to be withdrawn | published on 03.12.2003 [2003/49] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue M/S 2061 Santa Clara, California 95054-3299 / US | [N/P] |
| Former [2000/20] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue, M/S 2061 Santa Clara, California 95054-3299 / US | Inventor(s) | 01 /
Xu, Zheng 279 Hudson Bay Street Foster City, CA 94404 / US | 02 /
Parkhe, Vijay 4054 Bouquet Park Lane San Jose, CA 95135 / US | 03 /
Tzou, Eugene 860 Shirley Avenue Sunnyvale, CA 94086 / US | [2000/20] | Representative(s) | Käck, Jürgen, et al Patentanwälte Kahler Käck Mollekopf Vorderer Anger 239 86899 Landsberg/Lech / DE | [N/P] |
| Former [2002/40] | Käck, Jürgen, et al Kahler Käck Mollekopf Vorderer Anger 239 86899 Landsberg / DE | ||
| Former [2000/20] | Kahler, Kurt, Dipl.-Ing. Patentanwälte Kahler, Käck, Fiener et col., Vorderer Anger 268 86899 Landsberg/Lech / DE | Application number, filing date | 99122017.9 | 12.11.1999 | [2000/20] | Priority number, date | US19980191252 | 12.11.1998 Original published format: US 191252 | [2000/20] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1001455 | Date: | 17.05.2000 | Language: | EN | [2000/20] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.03.2000 | Classification | IPC: | H01L21/00, H01L21/68 | [2000/20] | CPC: |
H01L21/68 (KR);
H01L21/6831 (EP);
H01L21/6833 (EP)
| Designated contracting states | BE, DE, GB, NL [2001/05] |
| Former [2000/20] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Schutz für eine substrattragende Oberfläche und Verfahren zur Herstellung desselben | [2000/20] | English: | Apparatus for protecting a substrate support surface and method of fabricating same | [2000/20] | French: | Dispositif pour protéger une surface supportant un substrat et méthode de formation dudit dispositif | [2000/20] | Examination procedure | 17.11.2000 | Examination requested [2001/03] | 03.06.2003 | Application deemed to be withdrawn, date of legal effect [2003/49] | 04.07.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2003/49] | Fees paid | Renewal fee | 30.11.2001 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 30.11.2002 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]EP0856882 (APPLIED MATERIALS INC [US]) [Y] 1-21 * column 1, line 3 - column 6, line 42; figures 1-3 *; | [Y]EP0806798 (APPLIED MATERIALS INC [US]) [Y] 1-21 * column 1, line 3 - column 5, line 2; figures 1,2 *; | [YA]US5583736 (ANDERSON ROBERT A [US], et al) [Y] 5,12,18 * column 3, line 65 - column 5, line 5; figures 1-3 * [A] 1-4,8-12,15-17; | [Y]WO9847176 (MORGAN CRUCIBLE CO [GB], et al) [Y] 6,13,19 * page 15, lines 16-29; figure 4 * |