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EP0940838
European procedure
Extract from the Register of European Patents
EP About this file: EP0940838
| EP0940838 - In situ removal of contaminants from the interior surfaces of an ion beam implanter [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 30.03.2007 Database last updated on 21.01.2025 | Most recent event Tooltip | 23.10.2009 | Change - representative | published on 25.11.2009 [2009/48] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915-1053 / US | [2006/15] |
| Former [2000/33] | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915 / US | ||
| Former [1999/36] | For all designated states EATON CORPORATION Eaton Center, 1111 Superior Avenue Cleveland, Ohio 44114-2584 / US | Inventor(s) | 01 /
Blake, Julian Gaskill 211 Hart Street Beverly Farms, Massachusetts 01915 / US | [1999/36] | Representative(s) | Burke, Steven David, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | [2009/48] |
| Former [1999/36] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RH / GB | Application number, filing date | 99201060.3 | 03.06.1996 | [1999/36] | Priority number, date | US19950503299 | 17.07.1995 Original published format: US 503299 | [1999/36] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0940838 | Date: | 08.09.1999 | Language: | EN | [1999/36] | Type: | A3 Search report | No.: | EP0940838 | Date: | 02.01.2003 | [2003/01] | Type: | B1 Patent specification | No.: | EP0940838 | Date: | 12.04.2006 | Language: | EN | [2006/15] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 14.11.2002 | Classification | IPC: | H01J37/30 | [2003/01] | CPC: |
H01J37/3002 (EP,US);
H01J37/3171 (KR);
H01J37/304 (KR);
H01L21/02041 (KR);
H01L21/67028 (KR);
H01J2237/0041 (EP,US);
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| Former IPC [1999/36] | H01J37/317, H01J37/30 | Designated contracting states | DE, ES, FR, GB, IT, SE [1999/36] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | SI | Not yet paid | Title | German: | In-situ-Entfernen von Kontaminationsstoffen von den Innenoberflächen eines Ionen-Implantierungsgerät | [2005/42] | English: | In situ removal of contaminants from the interior surfaces of an ion beam implanter | [1999/36] | French: | Enlèvement in situ de contaminants sur les surfaces internes d'un implanteur ionique | [1999/36] |
| Former [1999/36] | In situ Entfernen von Kontaminationsstoffe von den innen Oberflächen eines Ionen-Implantierungsgerät | Examination procedure | 25.03.2003 | Examination requested [2003/21] | 11.12.2003 | Despatch of a communication from the examining division (Time limit: M04) | 21.04.2004 | Reply to a communication from the examining division | 05.10.2005 | Communication of intention to grant the patent | 13.02.2006 | Fee for grant paid | 13.02.2006 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP96303992.0 / EP0757373 | Opposition(s) | 15.01.2007 | No opposition filed within time limit [2007/18] | Fees paid | Renewal fee | 29.04.1999 | Renewal fee patent year 03 | 29.04.1999 | Renewal fee patent year 04 | 05.06.2000 | Renewal fee patent year 05 | 05.06.2001 | Renewal fee patent year 06 | 07.06.2002 | Renewal fee patent year 07 | 04.06.2003 | Renewal fee patent year 08 | 04.06.2004 | Renewal fee patent year 09 | 06.06.2005 | Renewal fee patent year 10 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | SE | 12.07.2006 | ES | 23.07.2006 | [2006/50] |
| Former [2006/49] | SE | 12.07.2006 | Documents cited: | Search | [Y]JPH02155147 ; | [A]JPS6120321 ; | [Y]US4665315 (BACCHETTI LAWRENCE F [US], et al) [Y] 1,4 * column A; figure - *; | [A]US4693760 (SIOSHANSI PIRAN [US]) [A] 1,5 * column 5, line 16 - column 6, line 24; figure 6 *; | [A]EP0474108 (TOSHIBA KK [JP]) [A] 1,5 * column 2, line 2 - column 3, line 20; figure - *; | [A]US5312519 (SAKAI ITSUKO [JP], et al) [A] 1,4* column A; figure - * | [Y] - PATENT ABSTRACTS OF JAPAN, (19900905), vol. 014, no. 411, Database accession no. (E - 0973), & JP02155147 A 19900614 (TOKYO ELECTRON LTD) [Y] 1,4 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19860614), vol. 010, no. 168, Database accession no. (E - 411), & JP61020321 A 19860129 (FUJITSU KK) [A] 1,4 * abstract * |