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EP1048338
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EP About this file: EP1048338
| EP1048338 - Recovery of perfluorinated compounds from the exhaust of semiconductor fabrications using membrane seperation [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 15.02.2002 Database last updated on 22.08.2024 | Most recent event Tooltip | 15.02.2002 | Application deemed to be withdrawn | published on 03.04.2002 [2002/14] | Applicant(s) | For all designated states AIR PRODUCTS AND CHEMICALS, INC. 7201 Hamilton Boulevard Allentown, PA 18195-1501 / US | [2000/44] | Inventor(s) | 01 /
Yang, James Hsu-Kuang 3568 Pleasant Road Allentown, PA 18103 / US | 02 /
Hsiung, Thomas Hsiao-Ling 4727 Glenwood Circle Emmaus, PA 18049 / US | 03 /
Chernyakov, Iosif 555 North Avenue, Apartment 15G Fort Lee, NJ 07024 / US | 04 /
Schwarz, Alexander 1949 Main Street Bethlehem, PA 18015 / US | [2000/44] | Representative(s) | Burford, Anthony Frederick Beck Greener Fulwood House 12 Fulwood Place London WC1V 6HR / GB | [N/P] |
| Former [2000/44] | Burford, Anthony Frederick W.H. Beck, Greener & Co. 7 Stone Buildings Lincoln's Inn London WC2A 3SZ / GB | Application number, filing date | 99303319.0 | 28.04.1999 | [2000/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1048338 | Date: | 02.11.2000 | Language: | EN | [2000/44] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 05.10.1999 | Classification | IPC: | B01D53/22 | [2000/44] | CPC: |
B01D53/228 (EP,US);
B01D53/226 (EP,US);
B01D2253/102 (EP,US);
B01D2253/108 (EP,US);
B01D2253/202 (EP,US);
B01D2257/204 (EP,US);
B01D2257/2066 (EP,US);
B01D2258/0216 (EP,US);
B01D53/0462 (EP,US);
| Designated contracting states | (deleted) [2001/29] |
| Former [2000/44] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Verfahren zur Rückgewinung von perfluorinierten Verbindungen in Abgasen bei der Halbleiterherstellung mittels Membrantrennung | [2000/44] | English: | Recovery of perfluorinated compounds from the exhaust of semiconductor fabrications using membrane seperation | [2000/44] | French: | Récupération par séparation à membrane des composés perfluorés présents dans les gaz d' échappement de procédés de fabrication de semi-conducteurs | [2000/44] | Examination procedure | 03.05.2001 | Application deemed to be withdrawn, date of legal effect [2002/14] | 12.10.2001 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2002/14] | Fees paid | Penalty fee | Penalty fee Rule 85a EPC 1973 | 18.07.2001 | DE M01 Not yet paid | 18.07.2001 | FR M01 Not yet paid | 18.07.2001 | GB M01 Not yet paid | 18.07.2001 | IT M01 Not yet paid | Penalty fee Rule 85b EPC 1973 | 18.07.2001 | M01 Not yet paid | Additional fee for renewal fee | 30.04.2001 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5730779 (CHERNYAKOV IOSIF [US], et al) [X] 1-3,5-7,10-23 * column 6, line 46 - line 51 * * column 5, line 47 - line 55 * * claims 1-10 *; | [X]EP0853970 (AIR LIQUIDE [FR]) [X] 1-3,7,10-22 * page 5, line 33 - line 36; claims 12-14,21,36,37,39 *; | [XA]US5759237 (LI YAO-EN [US], et al) [X] 1,2,12-22 * column 6, line 53 - line 59; claims 1-7,13,16-21,24 * [A] 3,5,6; | [X]US5843208 (ANUMAKONDA AMAR [US], et al) [X] 1,17,21,22 * abstract *; | [A]US4238204 (PERRY ELI [US]) [A] 1,8 * abstract * |