-
EP0969328
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP0969328
| EP0969328 - Position detection apparatus and exposure apparatus [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 29.01.2016 Database last updated on 10.05.2025 | Most recent event Tooltip | 29.01.2016 | Withdrawal of application | published on 02.03.2016 [2016/09] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | [N/P] |
| Former [2000/01] | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | Inventor(s) | 01 /
Katayama, Shoshi c/o Canon K.K., 30-2, 3-chome Shimomaruko, Ohta-ku Tokyo / JP | [2000/01] | Representative(s) | TBK Bavariaring 4-6 80336 München / DE | [N/P] |
| Former [2008/22] | TBK-Patent Bavariaring 4-6 80336 München / DE | ||
| Former [2000/01] | Beresford, Keith Denis Lewis, et al BERESFORD & Co. High Holborn 2-5 Warwick Court London WC1R 5DJ / GB | Application number, filing date | 99305100.2 | 29.06.1999 | [2000/01] | Priority number, date | JP19980204496 | 03.07.1998 Original published format: JP 20449698 | [2000/01] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0969328 | Date: | 05.01.2000 | Language: | EN | [2000/01] | Type: | A3 Search report | No.: | EP0969328 | Date: | 08.05.2002 | [2002/19] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.03.2002 | Classification | IPC: | G03F9/00, G03F7/20 | [2002/18] | CPC: |
G03F9/7096 (EP,US);
G01B11/03 (KR);
G03F7/70691 (EP,US);
G03F9/70 (EP,US)
|
| Former IPC [2000/01] | G03F9/00 | Designated contracting states | DE, GB, NL [2003/05] |
| Former [2000/01] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Vorrichtung zur Positionsdetektion und Belichtungsapparat | [2000/01] | English: | Position detection apparatus and exposure apparatus | [2000/01] | French: | Dispositif de détection de position et appareil d'exposition | [2000/01] | Examination procedure | 25.09.2002 | Examination requested [2002/47] | 18.11.2002 | Despatch of a communication from the examining division (Time limit: M06) | 04.07.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 09.09.2003 | Reply to a communication from the examining division | 04.11.2009 | Despatch of a communication from the examining division (Time limit: M04) | 11.03.2010 | Reply to a communication from the examining division | 06.09.2010 | Despatch of a communication from the examining division (Time limit: M04) | 10.01.2011 | Reply to a communication from the examining division | 04.07.2013 | Despatch of a communication from the examining division (Time limit: M04) | 13.11.2013 | Reply to a communication from the examining division | 09.10.2015 | Application withdrawn by applicant [2016/09] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 18.11.2002 | Request for further processing for: | 09.09.2003 | Request for further processing filed | 09.09.2003 | Full payment received (date of receipt of payment) Request granted | 27.01.2004 | Decision despatched | Fees paid | Renewal fee | 22.06.2001 | Renewal fee patent year 03 | 28.06.2002 | Renewal fee patent year 04 | 18.06.2003 | Renewal fee patent year 05 | 21.06.2004 | Renewal fee patent year 06 | 20.06.2005 | Renewal fee patent year 07 | 30.06.2006 | Renewal fee patent year 08 | 02.07.2007 | Renewal fee patent year 09 | 13.03.2008 | Renewal fee patent year 10 | 30.06.2009 | Renewal fee patent year 11 | 30.03.2010 | Renewal fee patent year 12 | 30.06.2011 | Renewal fee patent year 13 | 30.03.2012 | Renewal fee patent year 14 | 01.07.2013 | Renewal fee patent year 15 | 31.03.2014 | Renewal fee patent year 16 | 30.06.2015 | Renewal fee patent year 17 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5633720 (TAKAHASHI MASATO [JP]) [X] 1-26 * column 5, line 15 - column 11, line 7 * * figures 1-4 *; | [X]JPH06168867 ; | US5798530 [ ] (OKUMURA MASAHIKO [JP]) [ ] * column 7, line 16 - column 8, line 67 * * figure - *; | [X]GB2131205 (CANON KK) [X] 1-26 * page 2, line 124 - page 4, line 40 * * figure - *; | [X]EP0509797 (CANON KK [JP]) [X] 1-25 * column 7, line 31 - column 18, line 41 * * figures 1-3 * | [X] - PATENT ABSTRACTS OF JAPAN, (19940919), vol. 018, no. 499, Database accession no. (E - 1607), & JP06168867 A 19940614 (NIKON CORP) [X] 1-26 * abstract * |