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Extract from the Register of European Patents

EP About this file: EP1000673

EP1000673 - Wafer cleaning system with progressive megasonic wave [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  02.01.2004
Database last updated on 19.10.2024
Most recent event   Tooltip21.03.2008Lapse of the patent in a contracting state
New state(s): IT		published on 23.04.2008  [2008/17]
Applicant(s)For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
For all designated states
Kabushiki Kaisha Toshiba
72, Horikawa-cho, Saiwai-ku Kawasaki-shi
Kanagawa-ken 210-8572 / JP
[N/P]
Former [2002/26]For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
For all designated states
KABUSHIKI KAISHA TOSHIBA
72, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa-ken 210-8572 / JP
Former [2000/20]For all designated states
International Business Machines Corporation
Old Orchard Road
Armonk, N.Y. 10504 / US
For all designated states
KABUSHIKI KAISHA TOSHIBA
72, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa-ken 210-8572 / JP
Inventor(s)01 / Akatsu, Hiroyuki, c/o IBM United Kingdom Ltd.
Intellectual Property Law, Hursley Park
Winchester, Hampshire SO21 2JN / GB
02 / Nadahara, Soichi, c/o IBM United Kingdom Ltd.
Intellectual Property Law, Hursley Park
Winchester, Hampshire SO21 2JN / GB
[2000/20]
Representative(s)Boyce, Conor
IBM United Kingdom Limited
Intellectual Property Law
Hursley Park
Winchester
Hampshire SO21 2JN / GB
[N/P]
Former [2000/20]Boyce, Conor
IBM United Kingdom Limited, Intellectual Property Law, Hursley Park
Winchester, Hampshire SO21 2JN / GB
Application number, filing date99307796.504.10.1999
[2000/20]
Priority number, dateUS1998018942910.11.1998         Original published format: US 189429
[2000/20]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1000673
Date:17.05.2000
Language:EN
[2000/20]
Type: A3 Search report 
No.:EP1000673
Date:20.09.2000
[2000/38]
Type: B1 Patent specification 
No.:EP1000673
Date:26.02.2003
Language:EN
[2003/09]
Search report(s)(Supplementary) European search report - dispatched on:EP08.08.2000
ClassificationIPC:B08B3/12, H01L21/00
[2000/20]
CPC:
H01L21/67057 (EP,US); B08B3/12 (EP,US); Y10S134/902 (EP,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2000/20]
TitleGerman:System zum Reinigen von Halbleiterscheiben mit megasonischer Wanderwelle[2000/20]
English:Wafer cleaning system with progressive megasonic wave[2000/20]
French:Système pour nettoyer des plaquettes semiconductrices avec une onde mégasonique progressive[2000/20]
Examination procedure27.02.2001Examination requested  [2001/17]
14.05.2002Despatch of communication of intention to grant (Approval: No)
09.08.2002Despatch of communication of intention to grant (Approval: later approval)
27.08.2002Communication of intention to grant the patent
10.09.2002Fee for grant paid
10.09.2002Fee for publishing/printing paid
Opposition(s)27.11.2003No opposition filed within time limit [2004/08]
Fees paidRenewal fee
16.10.2001Renewal fee patent year 03
10.10.2002Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
IT26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
CY04.10.2003
LU04.10.2003
IE06.10.2003
MC31.10.2003
[2008/17]
Former [2005/03]AT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
CY04.10.2003
LU04.10.2003
IE06.10.2003
MC31.10.2003
Former [2005/02]AT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
CY04.10.2003
LU04.10.2003
MC31.10.2003
Former [2004/39]AT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
CY04.10.2003
LU04.10.2003
Former [2004/36]AT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
CY04.10.2003
Former [2004/10]AT26.02.2003
BE26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
Former [2004/05]AT26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
ES28.08.2003
Former [2004/02]AT26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
DK26.05.2003
PT26.05.2003
SE26.05.2003
Former [2003/47]AT26.02.2003
CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
PT26.05.2003
SE26.05.2003
Former [2003/46]CH26.02.2003
FI26.02.2003
GR26.02.2003
LI26.02.2003
NL26.02.2003
PT26.05.2003
SE26.05.2003
Former [2003/43]CH26.02.2003
FI26.02.2003
LI26.02.2003
NL26.02.2003
PT26.05.2003
SE26.05.2003
Former [2003/41]CH26.02.2003
FI26.02.2003
LI26.02.2003
NL26.02.2003
SE26.05.2003
Former [2003/40]CH26.02.2003
LI26.02.2003
SE26.05.2003
Former [2003/32]SE26.05.2003
Documents cited:Search[DA]US4064885  (DUSSAULT JEAN G M, et al) [DA] 1-3,7,8,12,13,15,16 * column A * * column 2, line 50 - column 4, line 22; figure - *;
 [YA]GB2097890  (BOULTON LTD WILLIAM) [Y] 1,3,13-16 * abstract * * page 1, line 63 - line 112; figure . * [A] 4,12;
 [A]FR2524909  (FRAMATOME SA [FR]) [A] 1-5,7,12,13,15,16 * page 1, line 31 - page 2, line 1 * * page 3, line 10 - line 37 * * page 4, line 21 - line 23; figure - *;
 [DA]US4768256  (MOTODA KENRO [JP]) [DA] 1,13* column A *;
 [DA]US5361449  (AKIMOTO MASAMI [JP]) [DA] 1,6,7,13,15,16 * column A * * column 1, line 34 - line 47; figure 1 *;
 [YA]EP0810643  (CANON KK [JP]) [Y] 1,3,13-16 * page 13, line 28 - line 45 * * page 21, line 5 - line 21 * * page 5, line 34 - line 39; figures 11,26,27 * [A] 12
ExaminationUS4326553
 US4869278
 US5383484
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.