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EP0951069
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EP About this file: EP0951069
| EP0951069 - Method of fabrication of a microstructure having an inside cavity [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.08.2016 Database last updated on 02.09.2024 | Most recent event Tooltip | 19.08.2016 | Application deemed to be withdrawn | published on 21.09.2016 [2016/38] | Applicant(s) | For all designated states IMEC Kapeldreef 75 3001 Leuven / BE | For all designated states CP Clare Corporation 78 Cherry Hill Drive Beverly, MA 01915-1048 / US | [2009/33] |
| Former [1999/42] | For all designated states INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW Kapeldreef 75 3001 Leuven / BE | ||
| For all designated states CP Clare Corporation 78 Cherry Hill Drive Beverly, MA 01915-1048 / US | Inventor(s) | 01 /
Tilmans, Hendrikus A. C. Salviabeemd 31F 6229 XA Maastricht / NL | 02 /
Van de Peer, Myriam D. J. Liebrechtlaan 39 1090 Brussels / BE | 03 /
Beyne, Eric Rotspoelstraat 15 3001 Leuven / BE | [1999/42] | Representative(s) | Van Malderen, Joëlle, et al pronovem - Office Van Malderen Avenue Josse Goffin 158 1082 Bruxelles / BE | [N/P] |
| Former [1999/42] | Van Malderen, Joelle, et al Office Van Malderen, Place Reine Fabiola 6/1 1083 Bruxelles / BE | Application number, filing date | 99870071.0 | 14.04.1999 | [1999/42] | Priority number, date | EP19980870085 | 17.04.1998 Original published format: EP 98870085 | EP19980870132 | 10.06.1998 Original published format: EP 98870132 | [1999/42] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0951069 | Date: | 20.10.1999 | Language: | EN | [1999/42] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 18.08.1999 | Classification | IPC: | H01L23/10, G01L9/00 | [1999/42] | CPC: |
B81C1/00293 (EP);
G01L9/0042 (EP);
G01L9/0073 (EP);
H01L21/50 (EP);
H01L23/10 (EP);
H01L2924/0002 (EP);
H01L2924/01077 (EP)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP)
| Designated contracting states | BE, CH, DE, ES, FR, GB, IT, LI, NL, SE [2000/26] |
| Former [1999/42] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Herstellungsverfahren für eine Mikrostruktur mit Innenraum | [1999/42] | English: | Method of fabrication of a microstructure having an inside cavity | [1999/42] | French: | Procédé de fabrication pour une microstructure avec une cavité interne | [1999/42] | Examination procedure | deleted | Communication of intention to grant the patent | 15.12.1999 | Examination requested [2000/09] | 21.04.2000 | Loss of particular rights, legal effect: designated state(s) | 03.08.2000 | Despatch of communication of loss of particular rights: designated state(s) AT, CY, DK, FI, GR, IE, LU, MC, PT | 14.11.2003 | Despatch of a communication from the examining division (Time limit: M06) | 14.05.2004 | Reply to a communication from the examining division | 14.10.2015 | Despatch of a communication from the examining division (Time limit: M06) | 26.04.2016 | Application deemed to be withdrawn, date of legal effect [2016/38] | 24.05.2016 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2016/38] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.11.2003 | Fees paid | Renewal fee | 12.04.2001 | Renewal fee patent year 03 | 08.04.2002 | Renewal fee patent year 04 | 15.04.2003 | Renewal fee patent year 05 | 28.04.2004 | Renewal fee patent year 06 | 27.04.2005 | Renewal fee patent year 07 | 28.04.2006 | Renewal fee patent year 08 | 25.04.2007 | Renewal fee patent year 09 | 26.03.2008 | Renewal fee patent year 10 | 28.04.2009 | Renewal fee patent year 11 | 28.04.2010 | Renewal fee patent year 12 | 29.04.2011 | Renewal fee patent year 13 | 26.03.2012 | Renewal fee patent year 14 | 24.04.2013 | Renewal fee patent year 15 | 14.03.2014 | Renewal fee patent year 16 | 08.04.2015 | Renewal fee patent year 17 | 30.03.2016 | Renewal fee patent year 18 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 26.05.2000 | AT M01 Not yet paid | 26.05.2000 | CY M01 Not yet paid | 26.05.2000 | DK M01 Not yet paid | 26.05.2000 | FI M01 Not yet paid | 26.05.2000 | GR M01 Not yet paid | 26.05.2000 | IE M01 Not yet paid | 26.05.2000 | LU M01 Not yet paid | 26.05.2000 | MC M01 Not yet paid | 26.05.2000 | PT M01 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [PXY]EP0849578 (MURATA MANUFACTURING CO) [PX] 1,3,8,11,12,15,17,18,21,24 * the whole document * [PY] 19,20; | [XA]US5317922 (BOMBACK JOHN L ET AL) [X] 21,24 * the whole document * [A] 1,2,5,6,9-12,14,15,18; | [XAY]WO9805935 (INTEGRATED SENSING SYSTEMS INC) [X] 21,24 * the whole document * [A] 1,12,16,18 [Y] 22,23; | [A]US5335550 (SATOU KIMITOSHI) [A] 1,2,11,15,18 * column 6, line 9 - column 7, line 20; figures 1-12 *; | [A]JPS5793225 ; | [DA]US5296408 (WILBARG ROBERT R ET AL) [DA] 1,21,24 * the whole document *; | [Y]EP0709659 (VALTION TEKNILLINEN ;VAISALA OY (FI)) [Y] 19,22 * column 3, lines 16-51; figures 1,2 *; | [Y]US5602385 (MATHIEU LYDIE ET AL) [Y] 20,23 * the whole document * | [A] - PATENT ABSTRACTS OF JAPAN, (19820909), vol. 006, no. 175, Database accession no. (P - 141), & JP57093225 A 19820610 (MITSUBISHI ELECTRIC CORP) [A] 1,11,14,15,17,18 * abstract * |