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EP1060370
European procedure
Extract from the Register of European Patents
EP About this file: EP1060370
| EP1060370 - METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 13.08.2004 Database last updated on 03.09.2024 | Most recent event Tooltip | 21.03.2008 | Lapse of the patent in a contracting state New state(s): IT | published on 23.04.2008 [2008/17] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2000/51] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
YAM, Mark 4977 Adair Way San Jose, CA 95124 / US | 02 /
HUNTER, Aaron, M. 430 Emeline Avenue Santa Cruz, CA 95060 / US | [2000/51] | Representative(s) | Cross, Rupert Edward Blount, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2000/51] | Cross, Rupert Edward Blount, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 99906951.1 | 11.02.1999 | [2000/51] | WO1999US03026 | Priority number, date | US19980026855 | 20.02.1998 Original published format: US 26855 | [2000/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9942797 | Date: | 26.08.1999 | Language: | EN | [1999/34] | Type: | A1 Application with search report | No.: | EP1060370 | Date: | 20.12.2000 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.08.1999 takes the place of the publication of the European patent application. | [2000/51] | Type: | B1 Patent specification | No.: | EP1060370 | Date: | 08.10.2003 | Language: | EN | [2003/41] | Search report(s) | International search report - published on: | EP | 26.08.1999 | Classification | IPC: | G01J5/04, G01J5/00 | [2000/51] | CPC: |
G01J5/041 (EP,US);
G01J5/0003 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2000/51] | Title | German: | VERFAHREN UND VORRICHTUNG ZUM MESSEN DER SUBSTRATTEMPERATUR | [2000/51] | English: | METHOD AND APPARATUS FOR MEASURING SUBSTRATE TEMPERATURE | [2000/51] | French: | PROCEDE ET APPAREIL DE MESURE DE LA TEMPERATURE D'UN SUBSTRAT | [2000/51] | Entry into regional phase | 25.08.2000 | National basic fee paid | 25.08.2000 | Designation fee(s) paid | 25.08.2000 | Examination fee paid | Examination procedure | 15.09.1999 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 25.08.2000 | Examination requested [2000/51] | 18.01.2001 | Despatch of a communication from the examining division (Time limit: M06) | 06.09.2001 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 14.11.2001 | Reply to a communication from the examining division | 07.02.2003 | Communication of intention to grant the patent | 08.08.2003 | Fee for grant paid | 08.08.2003 | Fee for publishing/printing paid | Opposition(s) | 09.07.2004 | No opposition filed within time limit [2004/40] | Request for further processing for: | 14.11.2001 | Request for further processing filed | 14.11.2001 | Full payment received (date of receipt of payment) Request granted | 28.11.2001 | Decision despatched | Fees paid | Renewal fee | 09.02.2001 | Renewal fee patent year 03 | 01.02.2002 | Renewal fee patent year 04 | 03.02.2003 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | FR | 08.10.2003 | IT | 08.10.2003 | GB | 11.02.2004 | [2008/17] |
| Former [2006/14] | FR | 08.10.2003 | |
| GB | 11.02.2004 | ||
| Former [2005/01] | GB | 11.02.2004 | Cited in | International search | [A]EP0718610 (APPLIED MATERIALS INC [US]) [A] 1,23,24,30-35 * page 3, line 45 - page 4, line 5 * * page 5, line 54 - page 6, line 5 * * page 13, line 57 - page 14, line 4 * * figure 1 *; | [A]EP0612862 (APPLIED MATERIALS INC [US]) [A] 1,23,24,30-35 * page 4, line 14 - line 20 * * page 9, line 41 - page 10, line 9 * * figure 3 * |