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Extract from the Register of European Patents

EP About this file: EP1089874

EP1089874 - LOW $g(k) DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 26.12.2014 Database last updated on 20.09.2024
Most recent event Tooltip	26.12.2014	Application deemed to be withdrawn	published on 28.01.2015 [2015/05]
Applicant(s)	For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US
	[2011/04]
Former [2011/03]	For all designated states Aviza Technology, Inc. 440 Kings Village Road Scotts Valley, CA 95066 / US
Former [2011/01]	For all designated states Thermal Acquisition Corp. 440 Kings Village Road Scotts Valley, CA 95066 / US
Former [2010/52]	For all designated states ASML US, Inc. 2240 Ringwood Avenue San Jose, CA 95131-1716 / US
Former [2010/51]	For all designated states Silicon Valley Group, Inc. Suite 400, 101 Metro Drive San Jose, CA 95110 / US
Former [2001/15]	For all designated states Silicon Valley Group Thermal Systems LLC 440 Kings Village Road Scotts Valley, CA 95066 / US
Inventor(s)	01 / ROSE, Peter 1095 Middleton Drive Boulder Creek, CA 95006 / US
	02 / LOPATA, Eugene 123 Sunset Terrace Scotts Valley, CA 95066 / US
	03 / FELTS, John 2624 Calhoune Street Alameda, CA 94501 / US
	[2001/15]
Representative(s)	Lambert, Ian Robert, et al Wynne-Jones, Lainé & James LLP Essex Place 22, Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB
	[N/P]
Former [2013/39]	Lambert, Ian Robert, et al Wynne-Jones, Lainé & James LLP Essex Place 22, Rodney Road Cheltenham GL50 1JJ / GB
Former [2009/31]	Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James LLP Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB
Former [2006/31]	Dunlop, Brian Kenneth Charles, et al Wynne-Jones, Lainé & James Essex Place 22 Rodney Road Cheltenham Gloucestershire GL50 1JJ / GB
Former [2002/50]	Stoner, Gerard Patrick, et al MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP / GB
Former [2002/48]	Stoner, Gerard Patrick, et al European Patent Attorney Mewburn Ellis 1 Redcliff Street Bristol BS1 6NP / GB
Former [2001/15]	McLeish, Nicholas Alistair Maxwell, et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB
Application number, filing date	99917529.2	15.04.1999
	[2001/15]
	WO1999US08246
Priority number, date	US19980067704	28.04.1998 Original published format: US 67704
	[2001/15]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO9955526
	Date:	04.11.1999
	Language:	EN
	[1999/44]
	Type:	A1 Application with search report
	No.:	EP1089874
	Date:	11.04.2001
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 04.11.1999 takes the place of the publication of the European patent application.
	[2001/15]
Search report(s)	International search report - published on:	US	04.11.1999
	(Supplementary) European search report - dispatched on:	EP	11.08.2004
Classification	IPC:	B32B9/04, H05H1/24, C23C16/00, C23C16/40, H01L21/316	[2004/39]
	CPC:	C09D4/00 (EP,US); B32B9/04 (KR); H01L21/3125 (US); C23C16/30 (EP,US); C23C16/401 (EP,US); H01L21/02126 (EP,US); (+) H01L21/02216 (EP,US); H01L21/02274 (EP,US); H01L21/3121 (US); H01L21/3122 (US); H01L21/3124 (US); H01L21/31633 (US); H01L21/02211 (EP); Y10T428/24917 (EP,US); Y10T428/31504 (EP,US); Y10T428/31663 (EP,US) (-)
	C-Set:	C09D4/00, C08G77/00 (EP,US); C09D4/00, C08G77/04 (US,EP)
	Former IPC [2001/15]	B32B9/04, H05H1/24, C23C16/00
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2001/15]
Title	German:	Nieder-$g(k) anorganische/organische dielektrische Hybridfilme und Herstellungsverfahren dazu	[2001/15]
	English:	LOW $g(k) DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS AND METHOD OF MAKING	[2001/15]
	French:	FILM DIELECTRIQUE HYBRIDE ORGANIQUE/MINERAL A FAIBLE $g(k) ET SON PROCEDE DE FABRICATION	[2001/15]
Entry into regional phase	20.10.2000	National basic fee paid
	20.10.2000	Search fee paid
	20.10.2000	Designation fee(s) paid
	20.10.2000	Examination fee paid
Examination procedure	14.10.1999	Request for preliminary examination filed International Preliminary Examining Authority: US
	20.10.2000	Amendment by applicant (claims and/or description)
	20.10.2000	Examination requested [2001/15]
	04.07.2006	Despatch of a communication from the examining division (Time limit: M06)
	10.01.2007	Reply to a communication from the examining division
	09.01.2008	Despatch of a communication from the examining division (Time limit: M06)
	07.07.2008	Reply to a communication from the examining division
	05.05.2009	Despatch of a communication from the examining division (Time limit: M06)
	15.02.2010	Reply to a communication from the examining division
	04.07.2011	Despatch of a communication from the examining division (Time limit: M04)
	14.10.2011	Reply to a communication from the examining division
	08.12.2011	Communication of intention to grant the patent
	03.04.2012	Fee for grant paid
	03.04.2012	Fee for publishing/printing paid
	17.09.2014	Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2015/05]
	10.12.2014	Application deemed to be withdrawn, date of legal effect [2015/05]
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.07.2006
Request for further processing for:	The application is deemed to be withdrawn due to failure to reply to the examination report
	15.02.2010	Request for further processing filed
	15.02.2010	Full payment received (date of receipt of payment) Request granted
	01.03.2010	Decision despatched
Fees paid	Renewal fee
	21.03.2001	Renewal fee patent year 03
	22.04.2002	Renewal fee patent year 04
	22.04.2003	Renewal fee patent year 05
	26.04.2004	Renewal fee patent year 06
	21.06.2005	Renewal fee patent year 07
	26.04.2006	Renewal fee patent year 08
	27.04.2007	Renewal fee patent year 09
	25.04.2008	Renewal fee patent year 10
	29.04.2009	Renewal fee patent year 11
	27.10.2010	Renewal fee patent year 12
	06.04.2011	Renewal fee patent year 13
	27.06.2012	Renewal fee patent year 14
	Penalty fee
	Additional fee for renewal fee
	30.04.2005	07 M06 Fee paid on 21.06.2005
	30.04.2010	12 M06 Fee paid on 27.10.2010
	30.04.2012	14 M06 Fee paid on 27.06.2012
	30.04.2013	15 M06 Not yet paid
	30.04.2014	16 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[X] - NARA A ET AL, "LOW DIELECTRIC CONSTANT INSULATOR FORMED BY DOWNSTREATM PLASMA CVD AT ROOM TEMPERATURE USING TMS/O2", JAPANESE JOURNAL OF APPLIED PHYSICS, PUBLICATION OFFICE JAPANESE JOURNAL OF APPLIED PHYSICS. TOKYO, JP, (199703), vol. 36, no. 3B, ISSN 0021-4922, pages 1477 - 1480, XP000861558 [X] 1-3,5-9 * paragraph [0003] * DOI: http://dx.doi.org/10.1143/JJAP.36.1477
		[A] - SUGAHARA G ET AL, "LOW DIELECTRIC CONSTANT CARBON CONTAINING SIO2 FILMS DEPOSITED BY PECVD TECHNIQUE USING A NOVEL CVD PRECURSOR", DUMIC CONFERENCE PROCEEDINGS, XX, XX, (19970210), pages 19 - 25, XP000950049 [A] 1-16 * the whole document *
	International search	[A] - SAHLI S, ET AL., "PROPERTIES OF PLASMA-POLYSILOXANE DEPOSITED BY PECVD", MATERIALS CHEMISTRY AND PHYSICS, LAUSANNE, CH, CH, (19930101), vol. 33, doi:10.1016/0254-0584(93)90099-8, pages 106 - 109, XP002921829 DOI: http://dx.doi.org/10.1016/0254-0584(93)90099-8
		[A] - INOUE Y, TAKAI O, "Spectroscopic Studies on Preparation of Silicon Oxide Films by PECVD Using Organosilicon Compounds", HCAPLUS, (19000101), Database accession no. 1996:453637, XP002921830

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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