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EP1093664
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EP About this file: EP1093664
| EP1093664 - TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.11.2005 Database last updated on 29.10.2024 | Most recent event Tooltip | 19.11.2005 | Application deemed to be withdrawn | published on 04.01.2006 [2006/01] | Applicant(s) | For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell Montana 59901 / US | [N/P] |
| Former [2001/17] | For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell, Montana 59901 / US | Inventor(s) | 01 /
McHUGH, Paul, R. 1912 Darlington Drive Kalispell, MT 59901 / US | 02 /
STODDARD, Kevin 10040 East Happy Valley Road Scottsdale, AZ 85255 / US | 03 /
TSAKALIS, Konstantinos 3516 West Ivanhoe Street Chandler, AZ 85226 / US | [2001/17] | Representative(s) | Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte Grillparzerstrasse 14 81675 München / DE | [N/P] |
| Former [2001/17] | Viering, Jentschura & Partner Postfach 22 14 43 80504 München / DE | Application number, filing date | 99921885.2 | 11.05.1999 | [2001/17] | WO1999US10329 | Priority number, date | US19980084907P | 11.05.1998 Original published format: US 84907 P | US19980084909P | 11.05.1998 Original published format: US 84909 P | US19980085257P | 13.05.1998 Original published format: US 85257 P | US19980086932P | 27.05.1998 Original published format: US 86932 P | [2001/17] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9959196 | Date: | 18.11.1999 | Language: | EN | [1999/46] | Type: | A1 Application with search report | No.: | EP1093664 | Date: | 25.04.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 18.11.1999 takes the place of the publication of the European patent application. | [2001/17] | Search report(s) | International search report - published on: | US | 18.11.1999 | (Supplementary) European search report - dispatched on: | EP | 22.05.2003 | Classification | IPC: | H01L21/205, F27B1/00, C23C16/52, F27D21/00, H01L21/00, C30B25/10, C30B25/16, C30B31/12, C30B31/18, F27D19/00 | [2003/13] | CPC: |
H01L21/67248 (EP,US);
H01L21/00 (KR);
C23C16/52 (EP,US);
C30B25/10 (EP,US);
C30B25/16 (EP,US);
C30B31/12 (EP,US);
C30B31/18 (EP,US);
F27B9/024 (EP,US);
F27B9/40 (EP,US);
F27D19/00 (EP,US);
F27D21/0014 (EP,US);
H01L21/67109 (EP,US);
F27B9/063 (EP,US)
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| Former IPC [2001/17] | H01L21/205, F27B1/00 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2001/17] | Title | German: | TEMPERATURKONTROLLSYSTEM FÜR THERMOREAKTOR | [2001/17] | English: | TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR | [2001/17] | French: | SYSTEME DE CONTROLE DE TEMPERATURE POUR REACTEUR THERMIQUE | [2001/17] | Entry into regional phase | 08.12.2000 | National basic fee paid | 08.12.2000 | Search fee paid | 08.12.2000 | Designation fee(s) paid | 08.12.2000 | Examination fee paid | Examination procedure | 10.12.1999 | Request for preliminary examination filed International Preliminary Examining Authority: US | 08.12.2000 | Examination requested [2001/17] | 26.09.2003 | Despatch of a communication from the examining division (Time limit: M06) | 17.03.2004 | Reply to a communication from the examining division | 31.01.2005 | Communication of intention to grant the patent | 11.06.2005 | Application deemed to be withdrawn, date of legal effect [2006/01] | 19.07.2005 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2006/01] | Fees paid | Renewal fee | 10.05.2001 | Renewal fee patent year 03 | 21.05.2002 | Renewal fee patent year 04 | 26.05.2003 | Renewal fee patent year 05 | 24.05.2004 | Renewal fee patent year 06 | 19.05.2005 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [PAD]WO9835531 (SEMITOOL INC [US]) [PAD] 1-4 * the whole document * | [A] - PORTER C ET AL, "IMPROVING FURNACES WITH MODEL-BASED TEMPERATURE CONTROL", SOLID STATE TECHNOLOGY, COWAN PUBL.CORP. WASHINGTON, US, (19961101), vol. 39, no. 11, ISSN 0038-111X, pages 119 - 120,122,124, XP000629348 [A] 1-4 * page 119 * * page 126 * * page 128 * * page 131 * | [A] - WILSON G J ET AL, "Numerical heat transfer simulations of a vertical batch furnace under closed-loop temperature control", PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANUFACTURING, PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON PROCESS CONTROL, DIAGNOSTICS, AND MODELLING IN SEMICONDUCTOR MANUFACT, 1997, Pennington, NJ, USA, Electrochem. Soc, USA, ISBN 1-56677-136-6, pages 110 - 117, XP001120071 [A] 1-4 * page 110 - page 112 * | International search | [Y]US4694143 (NISHIMURA TADASHI [JP], et al); | [Y]US4688180 (MOTOMIYA TAKEHIKO [JP]); | [Y]US5663899 (ZVONAR JOHN G [US], et al); | [Y]US5228114 (SUZUKI FUJIO [JP]); | [Y]JPH05190472 (KOKUSAI ELECTRIC CO LTD); | [Y]JPH0268611 (OMRON TATEISI ELECTRONICS CO); | [Y]JPH0666484 (ULVAC CORP); | [Y]JPH01246838 (NEC CORP); | [Y]US4716520 (LOCKE JR PHILIP F [US], et al); | [A]US5517594 (SHAH SUNIL C [US], et al); | [AP]US5790437 (SCHUH WILLIAM C [US], et al); | [A]US5359693 (NENYEI ZSOLT [DE], et al); | [A]US4982693 (EBATA HITOSHI [JP]) |