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EP1126511
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EP About this file: EP1126511
| EP1126511 - PLASMA FILM FORMING METHOD [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 04.03.2005 Database last updated on 19.10.2024 | Most recent event Tooltip | 04.03.2005 | Application deemed to be withdrawn | published on 20.04.2005 [2005/16] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku Tokyo 107-8481 / JP | [N/P] |
| Former [2001/34] | For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku, Tokyo 107-8481 / JP | Inventor(s) | 01 /
ENDO, Shunichi 1-12-4, Ikegami Ota-ku, Tokyo 146-0082 / JP | 02 /
HIRATA, Tadashi, 207 Sunny Crest Nishi-Funabashi 2-372, Katsushika-cho Funabashi-shi, Chiba 273-0032 / JP | [2001/34] | Representative(s) | Liesegang, Eva Boehmert & Boehmert Anwaltspartnerschaft mbB Pettenkoferstrasse 22 80336 München / DE | [N/P] |
| Former [2001/34] | Liesegang, Eva Forrester & Boehmert, Franz-Joseph-Strasse 38 80801 München / DE | Application number, filing date | 99943359.2 | 16.09.1999 | [2001/34] | WO1999JP05041 | Priority number, date | JP19980283471 | 18.09.1998 Original published format: JP 28347198 | [2001/34] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0017917 | Date: | 30.03.2000 | Language: | EN | [2000/13] | Type: | A1 Application with search report | No.: | EP1126511 | Date: | 22.08.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 30.03.2000 takes the place of the publication of the European patent application. | [2001/34] | Search report(s) | International search report - published on: | JP | 30.03.2000 | (Supplementary) European search report - dispatched on: | EP | 10.04.2003 | Classification | IPC: | C23C16/26, H01L21/768, H01L21/312 | [2003/22] | CPC: |
C23C16/26 (EP,KR,US);
H01L21/0212 (EP,KR,US);
H01L21/02274 (EP,KR,US);
H01L21/3127 (US);
H01L21/76837 (EP,KR,US)
|
| Former IPC [2001/34] | H01L21/205, H01L21/31, H01L21/314, C23C16/50 | Designated contracting states | BE, DE, FR, GB, IT, NL [2004/22] |
| Former [2001/34] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | PLASMALFILM-HERSTELLUNGSMETHODE | [2001/34] | English: | PLASMA FILM FORMING METHOD | [2001/34] | French: | PROCEDE DE FORMATION DE FILM AU PLASMA | [2001/34] | Entry into regional phase | 06.03.2001 | Translation filed | 06.03.2001 | National basic fee paid | 06.03.2001 | Search fee paid | 06.03.2001 | Designation fee(s) paid | 06.03.2001 | Examination fee paid | Examination procedure | 11.04.2000 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 06.03.2001 | Examination requested [2001/34] | 21.08.2003 | Despatch of a communication from the examining division (Time limit: M06) | 30.01.2004 | Reply to a communication from the examining division | 01.04.2004 | Despatch of a communication from the examining division (Time limit: M02) | 24.04.2004 | Reply to a communication from the examining division | 03.06.2004 | Communication of intention to grant the patent | 14.10.2004 | Application deemed to be withdrawn, date of legal effect [2005/16] | 19.11.2004 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2005/16] | Fees paid | Renewal fee | 12.09.2001 | Renewal fee patent year 03 | 12.09.2002 | Renewal fee patent year 04 | 12.09.2003 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 30.09.2004 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US5230931 (YAMAZAKI SHUNPEI [JP], et al) [A] 1-6 *column 2, lines 48-62; column 6, lines 15-16 and 56-57; column 9, lines 62-65; column 10, lines 9-17*; | [A]EP0701283 (NEC CORP [JP]) [A] 1-6*page 15, lines 1-40* | International search | [A]US5698901 (ENDO KAZUHIKO [JP]); | [A]JPH10144675 (TOKYO ELECTRON LTD); | [A]JPH10172965 (SONY CORP) |