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Extract from the Register of European Patents

EP About this file: EP1045439

EP1045439 - DEVICE FOR PROCESSING WAFER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  10.07.2009
Database last updated on 16.09.2024
Most recent event   Tooltip20.05.2011Lapse of the patent in a contracting state
New state(s): GR		published on 22.06.2011  [2011/25]
Applicant(s)For all designated states
Toho Kasei Ltd.
6-2, Imakokubu-cho Yamatokouriyama-shi
Nara 639-1031 / JP
For all designated states
DAIKIN INDUSTRIES, LTD.
Umeda Center Building, 4-12, Nakazaki-nishi 2-chome, Kita-ku
Osaka-shi, Osaka 530-8323 / JP
[2008/36]
Former [2000/42]For all designated states
Toho Kasei Ltd.
6-2, Imakokubu-cho
Yamatokouriyama-shi, Nara 639-1031 / JP
For all designated states
Daikin Industries, Ltd.
Umeda Center Building, 4-12, Nakazaki-nishi 2-chome Kita-ku
Osaka-shi Osaka 530-8323 / JP
Inventor(s)01 / MAEDA, Norio
6-2, Imakokubu-cho
Yamatokouriyama-shi Nara 639-1031 / JP
02 / OONO, Masao Kanaoka Koujou Sakai Seisakusho
1304 Kanaoka-cho
Sakai-shi Osaka 591-8022 / JP
03 / AIHARA, Hiroshi Kanaoka Koujou Sakai Seisakusho
1304 Kanaoka-cho
Sakai-shi Osaka 591-8022 / JP
[2000/42]
Representative(s)Hofer, Dorothea, et al
Prüfer & Partner GbR
Patentanwälte
Sohnckestrasse 12
81479 München / DE
[N/P]
Former [2008/35]Hofer, Dorothea, et al
Prüfer & Partner GbR Patentanwälte Sohnckestrasse 12
81479 München / DE
Former [2006/14]Hofer, Dorothea, et al
Prüfer & Partner GbR Patentanwälte Harthauser Strasse 25 d
81545 München / DE
Former [2000/42]Prüfer, Lutz H., Dipl.-Phys., et al
PRÜFER & PARTNER GbR, Patentanwälte, Harthauser Strasse 25d
81545 München / DE
Application number, filing date99959795.813.12.1999
[2000/42]
WO1999JP06998
Priority number, dateJP1998035259311.12.1998         Original published format: JP 35259398
[2000/42]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0036644
Date:22.06.2000
Language:EN
[2000/25]
Type: A1 Application with search report 
No.:EP1045439
Date:18.10.2000
Language:EN
The application published by WIPO in one of the EPO official languages on 22.06.2000 takes the place of the publication of the European patent application.
[2000/42]
Type: B1 Patent specification 
No.:EP1045439
Date:03.09.2008
Language:EN
[2008/36]
Search report(s)International search report - published on:JP22.06.2000
(Supplementary) European search report - dispatched on:EP08.12.2006
ClassificationIPC:H01L21/68, H01L21/304, B65G49/04, B65G49/07
[2000/42]
CPC:
H01L21/67057 (EP,US); H01L21/68 (KR)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2000/42]
TitleGerman:HALBLEITERBEARBEITUNGSVORRICHTUNG[2000/42]
English:DEVICE FOR PROCESSING WAFER[2000/42]
French:DISPOSITIF DE TRAITEMENT DE PLAQUETTES[2000/42]
Entry into regional phase10.08.2000Translation filed 
10.08.2000National basic fee paid 
10.08.2000Search fee paid 
10.08.2000Designation fee(s) paid 
10.08.2000Examination fee paid 
Examination proceduredeletedDecision about request for accelerated examination - accepted: No
10.08.2000Examination requested  [2000/42]
10.08.2000Request for accelerated examination filed
19.03.2007Despatch of a communication from the examining division (Time limit: M04)
17.07.2007Reply to a communication from the examining division
27.11.2007Communication of intention to grant the patent
15.05.2008Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time
09.07.2008Fee for grant paid
09.07.2008Fee for publishing/printing paid
Opposition(s)04.06.2009No opposition filed within time limit [2009/33]
Request for further processing for:The application is deemed to be withdrawn due to failure to fulfill actions required for granting the patent
09.07.2008Request for further processing filed
Fees paidRenewal fee
28.12.2001Renewal fee patent year 03
19.12.2002Renewal fee patent year 04
04.12.2003Renewal fee patent year 05
21.12.2004Renewal fee patent year 06
29.12.2005Renewal fee patent year 07
29.12.2006Renewal fee patent year 08
28.12.2007Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT03.09.2008
BE03.09.2008
CY03.09.2008
DK03.09.2008
FI03.09.2008
IT03.09.2008
NL03.09.2008
SE03.12.2008
GR04.12.2008
IE13.12.2008
LU13.12.2008
ES14.12.2008
CH31.12.2008
FR31.12.2008
LI31.12.2008
MC31.12.2008
PT03.02.2009
[2011/25]
Former [2010/44]AT03.09.2008
BE03.09.2008
CY03.09.2008
DK03.09.2008
FI03.09.2008
IT03.09.2008
NL03.09.2008
SE03.12.2008
IE13.12.2008
LU13.12.2008
ES14.12.2008
CH31.12.2008
FR31.12.2008
LI31.12.2008
MC31.12.2008
PT03.02.2009
Former [2010/28]AT03.09.2008
BE03.09.2008
DK03.09.2008
FI03.09.2008
IT03.09.2008
NL03.09.2008
SE03.12.2008
IE13.12.2008
LU13.12.2008
ES14.12.2008
CH31.12.2008
FR31.12.2008
LI31.12.2008
MC31.12.2008
PT03.02.2009
Former [2010/19]AT03.09.2008
BE03.09.2008
DK03.09.2008
FI03.09.2008
IT03.09.2008
NL03.09.2008
SE03.12.2008
IE13.12.2008
ES14.12.2008
CH31.12.2008
LI31.12.2008
MC31.12.2008
PT03.02.2009
Former [2010/06]AT03.09.2008
BE03.09.2008
DK03.09.2008
FI03.09.2008
IT03.09.2008
NL03.09.2008
IE13.12.2008
ES14.12.2008
CH31.12.2008
LI31.12.2008
MC31.12.2008
PT03.02.2009
Former [2009/30]AT03.09.2008
BE03.09.2008
FI03.09.2008
NL03.09.2008
ES14.12.2008
PT03.02.2009
Former [2009/19]AT03.09.2008
BE03.09.2008
FI03.09.2008
NL03.09.2008
ES14.12.2008
Former [2009/15]AT03.09.2008
FI03.09.2008
NL03.09.2008
ES14.12.2008
Former [2009/12]FI03.09.2008
NL03.09.2008
ES14.12.2008
Former [2009/09]NL03.09.2008
ES14.12.2008
Documents cited:Search[Y]DE4040131  (SEMAX GMBH [DE]) [Y] 2 * abstract *;
 [DXY]JPH08141526  (DAINIPPON SCREEN MFG) [DX] 1 * the whole document * [Y] 2,3;
 [Y]JPH1022256  (TOKYO ELECTRON LTD) [Y] 3* the whole document *
International search[A]JPH0246727  (FUJITSU LTD);
 [A]JPH0345636U  ;
 [X]JPH04349626  (TOSHIBA CORP);
 [X]JPH0536668  (TOSHIBA CORP);
 [Y]JPH08141526  (DAINIPPON SCREEN MFG);
 [A]JPH1022256  (TOKYO ELECTRON LTD);
 [AP]JPH11211345  (KAIJO KK);
 [AP]JPH11307504  (DAN KAGAKU KK);
 [AE]JPH11345798  (DAIKIN IND LTD)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.