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EP1359613
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EP About this file: EP1359613
| EP1359613 - Method of fabricating high density sub-lithographic features on a substrate [Right-click to bookmark this link] | Status | The application has been refused Status updated on 22.10.2010 Database last updated on 20.05.2024 | Most recent event Tooltip | 22.10.2010 | Refusal of application | published on 24.11.2010 [2010/47] | Applicant(s) | For all designated states Samsung Electronics Co., Ltd. 416 Maetan-dong Yeongtong-gu Suwon-si, Gyeonggi-do / KR | [N/P] |
| Former [2007/36] | For all designated states Samsung Electronics Co., Ltd. 416 Maetan-dong Yeongtong-gu Suwon-si, Gyeonggi-do / KR | ||
| Former [2003/45] | For all designated states Hewlett-Packard Company 3000 Hanover Street Palo Alto, CA 94303 / US | Inventor(s) | 01 /
Anthony, Thomas C. 1501 Page Mill Road Palo Alto, CA 94303 / US | [2003/45] | Representative(s) | Greene, Simon Kenneth, et al Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks, Kent TN13 1XR / GB | [N/P] |
| Former [2010/03] | Greene, Simon Kenneth, et al Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks Kent TN13 1XR / GB | ||
| Former [2007/36] | Greene, Simon Kenneth, et al Elkington and Fife LLP Prospect House 8 Pembroke Road Sevenoaks, Kent TN13 1XR / GB | ||
| Former [2003/45] | Exell, Jonathan Mark, et al Williams Powell Morley House 26-30 Holborn Viaduct London EC1A 2BP / GB | Application number, filing date | 03252668.3 | 28.04.2003 | [2003/45] | Priority number, date | US20020135900 | 29.04.2002 Original published format: US 135900 | [2003/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1359613 | Date: | 05.11.2003 | Language: | EN | [2003/45] | Type: | A3 Search report | No.: | EP1359613 | Date: | 19.01.2005 | [2005/03] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.12.2004 | Classification | IPC: | H01L21/308, H01L21/033 | [2003/45] | CPC: |
B82Y10/00 (EP,US);
H01L21/027 (KR);
G03F7/0005 (EP,US);
B82Y40/00 (EP,US);
G03F7/0002 (EP,US);
H01L21/0337 (EP,US)
| Designated contracting states | DE [2005/40] |
| Former [2003/45] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | Verfahren zur Herstellung von sublithographischen, hoghintegrieten Strukturen auf einem Substrat | [2003/45] | English: | Method of fabricating high density sub-lithographic features on a substrate | [2003/45] | French: | Procédé de formation de structures sub-lithographiques de haute densité sur un substrat | [2003/45] | Examination procedure | 13.06.2005 | Examination requested [2005/32] | 20.07.2005 | Loss of particular rights, legal effect: designated state(s) | 15.11.2005 | Despatch of communication of loss of particular rights: designated state(s) FR, GB, IT | 07.12.2006 | Despatch of a communication from the examining division (Time limit: M06) | 15.06.2007 | Reply to a communication from the examining division | 02.06.2010 | Application refused, date of legal effect [2010/47] | 02.06.2010 | Date of oral proceedings | 15.06.2010 | Minutes of oral proceedings despatched | 29.06.2010 | Despatch of communication that the application is refused, reason: substantive examination [2010/47] | Fees paid | Renewal fee | 20.04.2005 | Renewal fee patent year 03 | 26.04.2006 | Renewal fee patent year 04 | 27.04.2007 | Renewal fee patent year 05 | 31.03.2008 | Renewal fee patent year 06 | 16.04.2009 | Renewal fee patent year 07 | 25.03.2010 | Renewal fee patent year 08 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 26.08.2005 | FR M01 Not yet paid | 26.08.2005 | GB M01 Not yet paid | 26.08.2005 | IT M01 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY]US5328810 (LOWREY TYLER A [US], et al) [X] 12-20 * figure - * [Y] 1-11; | [Y]US5665622 (MULLER KARL PAUL LUDWIG [US], et al) [Y] 1-11 * figure - *; | [X]US6225175 (HOUSTON THEODORE W [US]) [X] 12-20* figure - *; | [X]US6335257 (TSENG HORNG-HUEI [TW]) [X] 12-20 * figure - * |