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Extract from the Register of European Patents

EP About this file: EP1780772

EP1780772 - EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD [Right-click to bookmark this link]
Status	Patent revoked Status updated on 05.11.2021 Database last updated on 17.05.2024
Former	The patent has been granted Status updated on 14.03.2020
Most recent event Tooltip	05.11.2021	Revocation of patent	published on 08.12.2021 [2021/49]
Applicant(s)	For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP
	[2015/36]
Former [2010/30]	For all designated states NIKON CORPORATION 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP
Former [2007/18]	For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome, Chiyoda-Ku Tokyo / JP
Inventor(s)	01 / SHIBUTA, Makoto, NIKON CORPORATION IP Dept. 2-3, Marunouchi 3-chome, Chiyoda-ku Tokyo, 100-8331 / JP
	[2007/18]
Representative(s)	Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE
	[N/P]
Former [2008/31]	HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE
Former [2007/18]	HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE
Application number, filing date	05758280.1	11.07.2005
	[2007/18]
	WO2005JP12776
Priority number, date	JP20040205009	12.07.2004 Original published format: JP 2004205009
	[2007/18]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2006006565
	Date:	19.01.2006
	Language:	EN
	[2006/03]
	Type:	A1 Application with search report
	No.:	EP1780772
	Date:	02.05.2007
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 19.01.2006 takes the place of the publication of the European patent application.
	[2007/18]
	Type:	B1 Patent specification
	No.:	EP1780772
	Date:	02.09.2009
	Language:	EN
	[2009/36]
Search report(s)	International search report - published on:	JP	19.01.2006
	(Supplementary) European search report - dispatched on:	EP	30.01.2008
Classification	IPC:	H01L21/027, G03F7/20	[2007/18]
	CPC:	G03F7/70341 (EP,KR,US); G03F7/2026 (KR); G03F7/2041 (KR); G03F7/70691 (EP,KR,US); G03F7/7085 (KR); G03F7/70916 (EP,KR,US)
Designated contracting states	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/18]
Extension states	AL	Not yet paid
	BA	Not yet paid
	HR	Not yet paid
	MK	Not yet paid
	YU	Not yet paid
Title	German:	BELICHTUNGSGERÄT UND BAUELEMENTE-HERSTELLUNGSVERFAHREN	[2009/13]
	English:	EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD	[2007/18]
	French:	EQUIPEMENT D'EXPOSITION ET PROCEDE DE FABRICATION DE DISPOSITIF	[2009/13]
	Former [2007/18]	BELICHTUNGSGERÄTE UND BAUELEMENTE-HERSTELLUNGSVERFAHREN
	Former [2007/18]	EQUIPEMENT DE PRISE DE VUE ET PROCEDE DE FABRICATION DE DISPOSITIF
Entry into regional phase	10.01.2007	Translation filed
	10.01.2007	National basic fee paid
	10.01.2007	Search fee paid
	10.01.2007	Designation fee(s) paid
	10.01.2007	Examination fee paid
Examination procedure	10.01.2007	Examination requested [2007/18]
	11.07.2008	Despatch of a communication from the examining division (Time limit: M06)
	14.01.2009	Reply to a communication from the examining division
	06.03.2009	Communication of intention to grant the patent
	06.07.2009	Fee for grant paid
	06.07.2009	Fee for publishing/printing paid
	27.07.2009	Despatch of a communication from the examining division (Time limit: M02)
	27.07.2009	Reply to a communication from the examining division
Opposition(s)	Opponent(s)	01 02.06.2010 18.02.2019 WITHDRAWN ASML NETHERLANDS B.V. P.O. Box 324 5500 AH Veldhoven / NL Opponents representative J A Kemp LLP 80 Turnmill Street London EC1M 5QU / GB
		[N/P]
	Former [2019/13]
	Opponent(s)	01 02.06.2010 18.02.2019 WITHDRAWN ASML NETHERLANDS B.V. P.O. Box 324 5500 AH Veldhoven / NL Opponents representative J A Kemp 14 South Square Gray's Inn London WC1R 5JJ / GB
	Former [2018/01]
	Opponent(s)	01 02.06.2010 11.06.2010 ADMISSIBLE ASML NETHERLANDS B.V. P.O. Box 324 5500 AH Veldhoven / NL Opponents representative J A Kemp 14 South Square Gray's Inn London WC1R 5JJ / GB
	Former [2017/29]
	Opponent(s)	01 02.06.2010 11.06.2010 ADMISSIBLE ASMIL NETHERLANDS B.V. Corporate Intellectual Property P.O.Box 324 5500 AH Veldhoven / NL Opponents representative J A Kemp 14 South Square Gray's Inn London WC1R 5JJ / GB
	Former [2010/28]
	Opponent(s)	01 02.06.2010 ASMIL NETHERLANDS B.V. Corporate Intellectual Property P.O.Box 324 5500 AH Veldhoven / NL Opponents representative Jackson, Martin Peter J.A. Kemp & Co. 14 South Square Gray's Inn GB-London WC1R 5JJ / GB
	13.07.2010	Invitation to proprietor to file observations on the notice of opposition
	20.01.2011	Reply of patent proprietor to notice(s) of opposition
	11.07.2012	Date of oral proceedings
	28.08.2012	Despatch of minutes of oral proceedings
	04.04.2018	Despatch of a communication from the opposition division (Time limit: M04)
	31.07.2018	Reply to a communication from the opposition division
	22.03.2019	Cancellation of oral proceeding that was planned for 16.10.2019
	27.03.2019	Despatch of interlocutory decision in opposition
	06.04.2019	Legal effect of interlocutory decision in opposition
	18.07.2019	Despatch of communication that the patent will be maintained as amended
	16.10.2019	Date of oral proceedings
	18.03.2020	Despatch of communication that the patent will be revoked
	28.03.2020	Legal effect of revocation of patent [2021/49]
Appeal following opposition	24.10.2012	Appeal received No. T2301/12
	27.12.2012	Statement of grounds filed
	10.03.2017	Invitation to file observations in an appeal (Time limit: M02) [2017/10]
	08.05.2017	Date of receipt of observations in an appeal [2017/19]
	22.11.2017	Result of appeal procedure: continuation of opposition procedure
	22.11.2017	Date of oral proceedings
	14.12.2017	Minutes of the oral proceedings despatched
Fees paid	Renewal fee
	17.07.2007	Renewal fee patent year 03
	25.07.2008	Renewal fee patent year 04
	16.07.2009	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	AT	02.09.2009
	BE	02.09.2009
	BG	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	TR	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	HU	03.03.2010
	GB	11.07.2010
	IE	11.07.2010
	LU	11.07.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
	FR	02.08.2010
	DE	01.02.2011
	[2021/21]
Former [2015/21]	AT	02.09.2009
	BE	02.09.2009
	BG	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	TR	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	HU	03.03.2010
	GB	11.07.2010
	IE	11.07.2010
	LU	11.07.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
	FR	02.08.2010
	DE	01.02.2011
Former [2011/35]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	GB	11.07.2010
	IE	11.07.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
	FR	02.08.2010
	DE	01.02.2011
Former [2011/32]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	GB	11.07.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
	FR	02.08.2010
	DE	01.02.2011
Former [2011/22]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
	DE	01.02.2011
Former [2011/20]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	CH	31.07.2010
	LI	31.07.2010
	MC	31.07.2010
Former [2011/16]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	IT	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	MC	31.07.2010
Former [2011/11]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
	MC	31.07.2010
Former [2011/01]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	GR	03.12.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
Former [2010/39]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	DK	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
Former [2010/30]	AT	02.09.2009
	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
Former [2010/28]	BE	02.09.2009
	CY	02.09.2009
	CZ	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
Former [2010/24]	CY	02.09.2009
	CZ	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	RO	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	SK	02.09.2009
	ES	13.12.2009
	IS	02.01.2010
	PT	04.01.2010
Former [2010/20]	CY	02.09.2009
	EE	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	ES	13.12.2009
Former [2010/19]	CY	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
	ES	13.12.2009
Former [2010/16]	CY	02.09.2009
	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
Former [2010/12]	FI	02.09.2009
	LT	02.09.2009
	LV	02.09.2009
	PL	02.09.2009
	SE	02.09.2009
	SI	02.09.2009
Documents cited:	Search	[XA]US5610683 (TAKAHASHI KAZUO [JP]) [X] 30,32,37 * abstract * * figures 1,8 * * column 5, lines 39,40 * * column 8, lines 50,51 * [A] 1;
		[PXA]US2005132914 (MULKENS JOHANNES C H [NL], et al) [PX] 1 * abstract * * figures 1,4 * * paragraph [0105] *[PA] 30,37
	International search	[A]JPH10335235 (NIKON CORP);
		[A]WO9949504 (NIKON CORP [JP], et al);
		[AP]JP2005184004 (ASML NETHERLANDS BV);
		[AE]JP2005259789 (NIKON CORP);
		[AE]JP2005268700 (NIKON CORP)
	by applicant	US5610683
		EP1528431

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