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Extract from the Register of European Patents

EP About this file: EP1828680

EP1828680 - REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING EFFLUENT ABATEMENT PROCESS [Right-click to bookmark this link]
Former [2007/36]REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT
[2011/36]
StatusNo opposition filed within time limit
Status updated on  07.12.2012
Database last updated on 18.05.2024
Most recent event   Tooltip07.12.2012No opposition filed within time limitpublished on 09.01.2013  [2013/02]
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2012/05]
Former [2007/36]For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
Inventor(s)01 / CHIU, Ho-Man, Rodney
1776 Wayne Circle
San Jose, CA 95131 / US
02 / CLARK, Daniel, O.
3657 Locke Court
Pleasanton, CA 94566 / US
03 / CRAWFORD, Shaun, W.
2827 Yarmouth Way
San Ramon, CA 94583 / US
04 / JUNG, Jay, J.
1068 Darrungton Court
Sunnyvale, CA 94087 / US
05 / TODD, Leonard, B.
69 Belvedere Ct
Napa, CA 94559 / US
06 / VERMEULEN, Robbert
77 Byron Drive
Pleasant Hill, CA 96523 / US
 [2007/36]
Representative(s)Zimmermann, Gerd Heinrich, et al
Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[N/P]
Former [2007/36]Zimmermann, Gerd Heinrich, et al
Zimmermann & Partner, P.O. Box 330 920
80069 München / DE
Application number, filing date05820049.412.11.2005
[2007/36]
WO2005US40960
Priority number, dateUS2004098792112.11.2004         Original published format: US 987921
[2007/36]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2006053231
Date:18.05.2006
Language:EN
[2006/20]
Type: A2 Application without search report 
No.:EP1828680
Date:05.09.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 18.05.2006 takes the place of the publication of the European patent application.
[2007/36]
Type: B1 Patent specification 
No.:EP1828680
Date:01.02.2012
Language:EN
[2012/05]
Search report(s)International search report - published on:EP23.11.2006
ClassificationIPC:F23G7/06, F23M5/08, F23J9/00
[2007/36]
CPC:
F23M5/085 (EP,US); F23G7/06 (KR); F23G7/065 (EP,US);
F23J9/00 (EP,KR,US); F23M5/08 (KR); F23D2900/00016 (EP,US);
F23M2900/05002 (EP,US); F23M2900/05004 (EP,US) (-)
Designated contracting statesDE,   FR,   GB,   IE,   IT [2007/51]
Former [2007/36]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:REAKTORAUSFÜHRUNG ZUR VERRINGERUNG DER TEILCHENABLAGERUNG BEI AUSSTOSSVERMINDERUNGSPROZESS[2011/36]
English:REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING EFFLUENT ABATEMENT PROCESS[2011/36]
French:CONCEPTION D'UN RÉACTEUR RÉDUISANT LES DÉPÔTS DE PARTICULES DANS UN PROCÉDÉ DE RÉDUCTION DES EFFLUENTS[2011/36]
Former [2007/36]REAKTORAUSFÜHRUNG ZUR VERRINGERUNG DER TEILCHENABLAGERUNG BEI PROZESSMINDERUNG
Former [2007/36]REACTOR DESIGN TO REDUCE PARTICLE DEPOSITION DURING PROCESS ABATEMENT
Former [2007/36]CONCEPTION D'UN REACTEUR REDUISANT LE DEPOT DE PARTICULES PENDANT LE PROCESSUS DE REDUCTION
Entry into regional phase12.06.2007National basic fee paid 
12.06.2007Designation fee(s) paid 
12.06.2007Examination fee paid 
Examination procedure12.06.2007Amendment by applicant (claims and/or description)
12.06.2007Examination requested  [2007/36]
12.06.2007Loss of particular rights, legal effect: designated state(s)
03.08.2007Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IS, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR
17.12.2010Despatch of a communication from the examining division (Time limit: M04)
27.04.2011Reply to a communication from the examining division
09.08.2011Communication of intention to grant the patent
09.12.2011Fee for grant paid
09.12.2011Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  17.12.2010
Opposition(s)05.11.2012No opposition filed within time limit [2013/02]
Fees paidRenewal fee
12.06.2007Renewal fee patent year 03
07.11.2008Renewal fee patent year 04
06.11.2009Renewal fee patent year 05
22.10.2010Renewal fee patent year 06
07.11.2011Renewal fee patent year 07
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipIT01.02.2012
[2012/50]
Cited inInternational search[Y]JPH09133333  ;
 [A]JPH02225905  ;
 [A]JPH06313532  ;
 [A]JP2001082723  ;
 [A]US4392821  (FUESSL ERWIN [CH], et al) [A] 1,42,57 * column 1, line 66 - column 2, line 15 * * column 3, line 26 - line 35 *;
 [XY]EP0694735  (ALZETA CORP [US]) [X] 37,41 * column 1, line 3 - line 22 * * column 4, line 13 - line 28 * * column 6, line 14 - line 29 * * column 6, line 46 - column 7, line 7; figure 3 * [Y] 1-10,13-29,31-33,35,36,38-40,42-61;
 [A]EP0802370  (BOC GROUP PLC [GB]) [A] 1,42,57 * page 3, line 18 - line 42; figure 1 *;
 [Y]EP0809071  (BURNER SYSTEMS INT [US]) [Y] 14,15 * column 2, line 58 - column 3, line 17 * * column 15, line 1 - line 15 *;
 [A]US6234787  (ENDOH FUMITAKA [JP], et al) [A] 1,28,29,42,53,54,57 * column 1, line 6 - line 13 * * column 1, line 65 - column 2, line 9 * * column 3, line 62 - column 4, line 24 * * column 9, line 22 - line 28 *;
 [YA]EP1143197  (EBARA CORP [JP]) [Y] 8,9 * paragraphs [0032] - [0034] - [0060] , [0090] , [0091]; figures 17,18 * [A] 1,42,57;
 [Y]EP1431657  (AEROMATIX LTD [GB]) [Y] 13 * paragraphs [0004] , [0005]; figure 6 *;
 [Y]US2004161718  (PETTIT WILLIAM H [US]) [Y] 16,17,35,36,38-40,49,50 * paragraph [0028]; figure 1 *
 [Y]  - PATENT ABSTRACTS OF JAPAN, (19970930), vol. 1997, no. 09, & JP09133333 A 19970520 (MAROO ZOKEI KK) [Y] 1-10,13-29,31-33,35,36,38-40,42-61 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19901127), vol. 014, no. 536, Database accession no. (M - 1052), & JP02225905 A 19900907 (MITSUBISHI HEAVY IND LTD) [A] 1,42,57 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (19950331), vol. 1995, no. 02, & JP06313532 A 19941108 (SHINAGAWA REFRACT CO LTD) [A] 1,42,57 * abstract *
 [A]  - PATENT ABSTRACTS OF JAPAN, (20010710), vol. 2000, no. 20, & JP2001082723 A 20010330 (NIPPON SANSO CORP) [A] 1,42,57 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.