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EP2848997
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EP About this file: EP2848997
| EP2848997 - Scanning probe nanolithography system and method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.02.2016 Database last updated on 22.11.2024 | Most recent event Tooltip | 24.08.2018 | Change - applicant | published on 26.09.2018 [2018/39] | Applicant(s) | For all designated states SwissLitho AG Technoparkstrasse 1 8005 Zürich / CH | For all designated states International Business Machines Corporation New Orchard Road Armonk, NY 10504 / US | [2018/39] |
| Former [2015/12] | For all designated states SwissLitho AG Technoparkstrasse 1 8005 Zürich / CH | ||
| For all designated states Intellectual Business Machines Corporation New Orchard Road Armonk, New York 10504 / US | Inventor(s) | 01 /
Holzner, Felix Leimbachstrasse 215 8041 Zürich / CH | 02 /
Paul, Philip Rainstrasse 13 8134 Adliswil / CH | 03 /
Zientek, Michal Schützenrain 31 8047 Zürich / CH | 04 /
Knoll, Armin Oberhusstrasse 9 8134 Adliswil / CH | 05 /
Rawlings, Colin Oberer Rütiweg 1 8803 Rüschlikon / CH | [2015/12] | Representative(s) | Liebetanz, Michael Isler & Pedrazzini AG Giesshübelstrasse 45 Postfach 1772 8027 Zürich / CH | [N/P] |
| Former [2015/12] | Liebetanz, Michael Isler & Pedrazzini AG Postfach 1772 8027 Zürich / CH | Application number, filing date | 13184651.1 | 16.09.2013 | [2015/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2848997 | Date: | 18.03.2015 | Language: | EN | [2015/12] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.02.2014 | Classification | IPC: | G03F7/00 | [2015/12] | CPC: |
G03F7/0002 (EP,US);
G03F7/70775 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/12] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | Rastersonden-Nanolithografiesystem und Verfahren | [2015/12] | English: | Scanning probe nanolithography system and method | [2015/12] | French: | Système et procédé de nanolithographie à sonde de balayage | [2015/12] | Examination procedure | 16.09.2013 | Examination requested [2015/12] | 19.09.2015 | Application deemed to be withdrawn, date of legal effect [2016/11] | 27.10.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [2016/11] | Fees paid | Penalty fee | Additional fee for renewal fee | 30.09.2015 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [Y]US4889988 (ELINGS VIRGIL B [US], et al) [Y] 1-3 * column 4, lines 5-48; claims 1-12 *; | [XAY]US5327625 (CLARK JR HARRY R [US], et al) [X] 1,3 * column 2, lines 51-53; claims 1,2 * * column 3, lines 9-12 * [A] 13,14 [Y] 2,4-12; | [XAY]US5825670 (CHERNOFF DONALD A [US], et al) [X] 1,3 * column 33, line 26 - column 34, line 16; claim 1 * [A] 13,14 [Y] 2,4-12; | [Y]US2003185967 (EBY RAYMOND K [US], et al) [Y] 1-3 * paragraphs [0007] , [0008] , [0044] , [0064] , [0065]; figure 4; claims 41-50 *; | [XAY]US7060977 (DUPEYRAT SYLVAIN CRUCHON [US], et al) [X] 1,3-8,10-12 * claims 1-6,8,16-18,35-37,63,64,67 * [A] 13,14 [Y] 2,9; | [XAY]US2011268882 (BUSSAN JOHN EDWARD [US], et al) [X] 1,3-8,10-12 * paragraphs [0003] , [0004] , [0068] , [0073] , [0078] , [0087] , [0088] , [0107] - [0109]; figures 1B,2B; claims 1-3,6,9,18,44,64 * [A] 13,14 [Y] 2,9; | [YD]US8261662 (SHILE RAYMOND ROGER [US], et al) [YD] 1-3 * column 14, line 1 - column 15, line 26; claim 1 ** column 26, lines 23-38 * | by applicant | US8261662 | - YAN ET AL., SMALL, (2010), vol. 6, no. 6, pages 724 - 728 | - CHEN ET AL., OPTICS LETTERS, (2005), vol. 30, no. 6, pages 652 - 654 | - ROLANDI ET AL., ANGEWANDTE CHEMIE INTERNATIONAL EDITION, (2007), vol. 46, no. 39, pages 7477 - 7480 | - SRITURAVANICH ET AL., NATURE NANOTECHNOLOGY, (2008), vol. 3, no. 12, pages 733 - 737 | - RADHA ET AL., ACS NANO, (2013), vol. 7, no. 3, pages 2602 - 2609 | - PIRES ET AL., SCIENCE, (2010), vol. 328, page 732 | - SZOSZKIEWICZ ET AL., NANO LETTERS, (2007), vol. 7, no. 4, pages 1064 - 1069 | - MARTINEZ ET AL., NANOTECHNOLOGY, (2010), vol. 21, no. 24, page 245301 | - NELSON ET AL., APPLIED PHYSICS LETTERS, (2006), vol. 88, page 033104 |