EP0304068 - Removing resist layers [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 04.11.1993 Database last updated on 17.05.2024 | Most recent event Tooltip | 04.11.1993 | No opposition filed within time limit | published on 22.12.1993 [1993/51] | Applicant(s) | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | [N/P] |
Former [1989/08] | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 / JP | Inventor(s) | 01 /
Fujimura, Shuzo c/o FUJITSU LIMITED Patent Department 1015 Kamikodanaka Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | 02 /
Konno, Junichi c/o FUJITSU LIMITED Patent Department 1015 Kamikodanaka Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | [1989/08] | Representative(s) | Sunderland, James Harry, et al Haseltine Lake LLP Lincoln House 300 High Holborn London WC1V 7JH / GB | [N/P] |
Former [1989/08] | Sunderland, James Harry, et al HASELTINE LAKE & CO Hazlitt House 28 Southampton Buildings Chancery Lane London WC2A 1AT / GB | Application number, filing date | 88113456.3 | 18.08.1988 | [1989/08] | Priority number, date | JP19870203986 | 19.08.1987 Original published format: JP 20398687 | [1989/08] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0304068 | Date: | 22.02.1989 | Language: | EN | [1989/08] | Type: | A3 Search report | No.: | EP0304068 | Date: | 26.07.1989 | Language: | EN | [1989/30] | Type: | B1 Patent specification | No.: | EP0304068 | Date: | 30.12.1992 | Language: | EN | [1992/53] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.06.1989 | Classification | IPC: | C23F1/12, G03F7/26, C23F1/02, H01L21/306, H01L21/465 | [1989/29] | CPC: |
H01L21/31138 (EP,US);
H01L21/302 (KR);
G03F7/427 (EP,US)
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Former IPC [1989/08] | C23F1/12, G03F7/26 | Designated contracting states | DE, FR, GB [1989/08] | Title | German: | Entfernen von Resistschichten | [1989/08] | English: | Removing resist layers | [1989/08] | French: | Enlèvement de couches résistives | [1989/08] | Examination procedure | 03.11.1989 | Examination requested [1990/01] | 11.03.1991 | Despatch of a communication from the examining division (Time limit: M06) | 12.08.1991 | Reply to a communication from the examining division | 27.03.1992 | Despatch of communication of intention to grant (Approval: Yes) | 30.06.1992 | Communication of intention to grant the patent | 18.09.1992 | Fee for grant paid | 18.09.1992 | Fee for publishing/printing paid | Opposition(s) | 01.10.1993 | No opposition filed within time limit [1993/51] | Fees paid | Renewal fee | 13.08.1990 | Renewal fee patent year 03 | 08.08.1991 | Renewal fee patent year 04 | 10.08.1992 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP57155381 ; | [A]EP0067066 (FUJITSU LTD [JP]); | EP0151408 [ ] (IBM [US]) | [A] - PATENT ABSTRACTS OF JAPAN, Unexamined Applications, C Field, Vol. 6, No. 261, December 21, 1982 The Patent Office Japanese Government page 155 C 141, & JP-A-57 155 381 (Mitshubishi Denki K.K.), & JP57155381 A 00000000 |