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Extract from the Register of European Patents

EP About this file: EP0304068

EP0304068 - Removing resist layers [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.11.1993
Database last updated on 17.05.2024
Most recent event   Tooltip04.11.1993No opposition filed within time limitpublished on 22.12.1993 [1993/51]
Applicant(s)For all designated states
FUJITSU LIMITED
1015, Kamikodanaka, Nakahara-ku Kawasaki-shi
Kanagawa 211 / JP
[N/P]
Former [1989/08]For all designated states
FUJITSU LIMITED
1015, Kamikodanaka, Nakahara-ku
Kawasaki-shi, Kanagawa 211 / JP
Inventor(s)01 / Fujimura, Shuzo c/o FUJITSU LIMITED
Patent Department 1015 Kamikodanaka Nakahara-ku
Kawasaki-shi Kanagawa 211 / JP
02 / Konno, Junichi c/o FUJITSU LIMITED
Patent Department 1015 Kamikodanaka Nakahara-ku
Kawasaki-shi Kanagawa 211 / JP
[1989/08]
Representative(s)Sunderland, James Harry, et al
Haseltine Lake LLP Lincoln House 300 High Holborn London
WC1V 7JH / GB
[N/P]
Former [1989/08]Sunderland, James Harry, et al
HASELTINE LAKE & CO Hazlitt House 28 Southampton Buildings Chancery Lane
London WC2A 1AT / GB
Application number, filing date88113456.318.08.1988
[1989/08]
Priority number, dateJP1987020398619.08.1987         Original published format: JP 20398687
[1989/08]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0304068
Date:22.02.1989
Language:EN
[1989/08]
Type: A3 Search report 
No.:EP0304068
Date:26.07.1989
Language:EN
[1989/30]
Type: B1 Patent specification 
No.:EP0304068
Date:30.12.1992
Language:EN
[1992/53]
Search report(s)(Supplementary) European search report - dispatched on:EP07.06.1989
ClassificationIPC:C23F1/12, G03F7/26, C23F1/02, H01L21/306, H01L21/465
[1989/29]
CPC:
H01L21/31138 (EP,US); H01L21/302 (KR); G03F7/427 (EP,US)
Former IPC [1989/08]C23F1/12, G03F7/26
Designated contracting statesDE,   FR,   GB [1989/08]
TitleGerman:Entfernen von Resistschichten[1989/08]
English:Removing resist layers[1989/08]
French:Enlèvement de couches résistives[1989/08]
Examination procedure03.11.1989Examination requested  [1990/01]
11.03.1991Despatch of a communication from the examining division (Time limit: M06)
12.08.1991Reply to a communication from the examining division
27.03.1992Despatch of communication of intention to grant (Approval: Yes)
30.06.1992Communication of intention to grant the patent
18.09.1992Fee for grant paid
18.09.1992Fee for publishing/printing paid
Opposition(s)01.10.1993No opposition filed within time limit [1993/51]
Fees paidRenewal fee
13.08.1990Renewal fee patent year 03
08.08.1991Renewal fee patent year 04
10.08.1992Renewal fee patent year 05
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Documents cited:Search[A]JP57155381  ;
 [A]EP0067066  (FUJITSU LTD [JP]);
 EP0151408  [ ] (IBM [US])
 [A]  - PATENT ABSTRACTS OF JAPAN, Unexamined Applications, C Field, Vol. 6, No. 261, December 21, 1982 The Patent Office Japanese Government page 155 C 141, & JP-A-57 155 381 (Mitshubishi Denki K.K.), & JP57155381 A 00000000
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.