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Extract from the Register of European Patents

EP About this file: EP0855451

EP0855451 - WIRING FILM, SPUTTER TARGET FOR FORMING THE WIRING FILM AND ELECTRONIC COMPONENT USING THE SAME [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  23.09.2005
Database last updated on 24.04.2024
Most recent event   Tooltip23.09.2005Application deemed to be withdrawnpublished on 09.11.2005  [2005/45]
Applicant(s)For all designated states
Kabushiki Kaisha Toshiba
72, Horikawa-cho, Saiwai-ku Kawasaki-shi
Kanagawa-ken 210-8572 / JP
[N/P]
Former [1998/31]For all designated states
KABUSHIKI KAISHA TOSHIBA
72, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa-ken 210 / JP
Inventor(s)01 / ISHIGAMI, Takashi
303-1-2-713, Katsura-cho, Sakae-ku
Yokohama-shi, Kanagawa 247 / JP
02 / WATANABE, Koichi
14-1-D-103, Hiyoshi-Honcho 4-chome, Kohoku-ku
Yokohama-shi, Kanagawa 223 / JP
03 / NITTA, Akihisa
57-3-103, Higashi-Kibogaoka, Asahi-ku
Yokohama-shi, Kanagawa 241 / JP
04 / MAKi, Toshihiro
3-8-15-P2-101, Konan, Konan-ku
Yokohama-shi, Kanagawa 233 / JP
05 / YAGI, Noriaki
2121-D103, Totsuka-cho, Totsuka-ku
Yokohama-shi, Kanagawa 244 / JP
[1998/31]
Representative(s)Waldren, Robin Michael, et al
Marks & Clerk LLP
90 Long Acre
London
WC2E 9RA / GB
[N/P]
Former [1998/31]Waldren, Robin Michael, et al
MARKS & CLERK, 57-60 Lincoln's Inn Fields
London WC2A 3LS / GB
Application number, filing date96933629.614.10.1996
[1998/31]
WO1996JP02961
Priority number, dateJP1995026447212.10.1995         Original published format: JP 26447295
[1998/31]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9713885
Date:17.04.1997
Language:EN
[1997/17]
Type: A1 Application with search report 
No.:EP0855451
Date:29.07.1998
Language:EN
The application published by WIPO in one of the EPO official languages on 17.04.1997 takes the place of the publication of the European patent application.
[1998/31]
Search report(s)International search report - published on:JP17.04.1997
(Supplementary) European search report - dispatched on:EP23.08.1999
ClassificationIPC:C23C14/14, C23C14/34, H01L21/3205, H01L23/48, H01L23/498, H01L27/01, H01L23/532
[1999/40]
CPC:
H01L21/32051 (EP,US); C23C14/14 (EP,KR,US); C22C21/00 (EP,US);
C23C14/165 (EP,US); C23C14/3414 (EP,US); H01L21/2855 (EP,US);
H01L21/3205 (KR); H01L23/53214 (EP,US); H01L23/53219 (EP,US);
H03H9/14538 (EP,US); G02F1/136295 (EP,US); H01L2224/32225 (EP,US);
H01L2224/48091 (EP,US); H01L2224/48227 (EP,US); H01L2224/73265 (EP,US);
H01L2924/16152 (EP,US); H01L2924/181 (EP,US) (-)
C-Set:
H01L2224/48091, H01L2924/00014 (EP,US);
H01L2224/73265, H01L2224/32225, H01L2224/48227, H01L2924/00 (US,EP);
H01L2924/181, H01L2924/00012 (US,EP)
Former IPC [1998/31]C23C14/14, C23C14/34, H01L21/3205, H01L23/48
Designated contracting statesDE,   FR,   GB [1998/31]
TitleGerman:DRAHTFILM, SPUTTERTARGET ZUR HERSTELLUNG DES DRAHTFILMS UND ELEKTRONISCHE TEILE, DIE DIESEN VERWENDEN[1998/31]
English:WIRING FILM, SPUTTER TARGET FOR FORMING THE WIRING FILM AND ELECTRONIC COMPONENT USING THE SAME[1998/31]
French:FILM DE CABLAGE, CIBLE DE PULVERISATION PAR BOMBARDEMENT IONIQUE DESTINEE A LA FORMATION DE CE FILM ET COMPOSANT ELECTRONIQUE COMPORTANT CE FILM[1998/31]
Entry into regional phase10.04.1998Translation filed 
15.04.1998National basic fee paid 
15.04.1998Search fee paid 
15.04.1998Designation fee(s) paid 
15.04.1998Examination fee paid 
Examination procedure09.04.1997Request for preliminary examination filed
International Preliminary Examining Authority: JP
15.04.1998Examination requested  [1998/31]
09.04.2001Despatch of a communication from the examining division (Time limit: M04)
02.08.2001Reply to a communication from the examining division
05.06.2002Despatch of a communication from the examining division (Time limit: M06)
16.12.2002Reply to a communication from the examining division
20.05.2003Despatch of a communication from the examining division (Time limit: M04)
30.09.2003Reply to a communication from the examining division
20.10.2004Communication of intention to grant the patent
03.05.2005Application deemed to be withdrawn, date of legal effect  [2005/45]
07.06.2005Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time  [2005/45]
Divisional application(s)EP05003598.9  / EP1553205
Fees paidRenewal fee
12.10.1998Renewal fee patent year 03
14.10.1999Renewal fee patent year 04
11.10.2000Renewal fee patent year 05
11.10.2001Renewal fee patent year 06
15.10.2002Renewal fee patent year 07
14.10.2003Renewal fee patent year 08
14.10.2004Renewal fee patent year 09
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Documents cited:Search[A]DE3911657  (TELEFUNKEN ELECTRONIC GMBH [DE]) [A] 1-17 * the whole document *;
 [A]US4302498  (FAITH JR THOMAS J) [A] 1-17 * abstract *
International search[Y]JPH0745555  (KOBE STEEL LTD);
 [X]JPS62235454  (NIPPON MINING CO);
 [X]JPS62240738  (NIPPON MINING CO);
 [Y]JPH05171434  (CASIO COMPUTER CO LTD);
 [Y]JPH05239635  (SHIMADZU CORP)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.