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Extract from the Register of European Patents

EP About this file: EP0997761

EP0997761 - OPTICAL DEVICE, METHOD OF CLEANING THE SAME, PROJECTION ALIGNER, AND METHOD OF PRODUCING THE SAME [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 23.09.2005 Database last updated on 07.10.2024
Most recent event Tooltip	23.09.2005	Application deemed to be withdrawn	published on 09.11.2005 [2005/45]
Applicant(s)	For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP
	[N/P]
Former [2000/18]	For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP
Inventor(s)	01 / AKAGAWA, Masayuki, Nikon Corp. 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP
	02 / YAMASHITA, Osamu, Nikon Corp. 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP
	03 / TANIUCHI, Taichi, Nikon Corp. 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo 100-8331 / JP
	[2000/18]
Representative(s)	Skone James, Robert Edmund, et al Gill Jennings & Every LLP The Broadgate Tower 20 Primrose Street London EC2A 2ES / GB
	[N/P]
Former [2005/20]	Skone James, Robert Edmund, et al GILL JENNINGS & EVERY, Broadgate House, 7 Eldon Street London EC2M 7LH / GB
Former [2000/18]	Rackham, Stephen Neil GILL JENNINGS & EVERY, Broadgate House, 7 Eldon Street London EC2M 7LH / GB
Application number, filing date	98923177.4	09.06.1998
	[2000/18]
	WO1998JP02536
Priority number, date	JP19970152695	10.06.1997 Original published format: JP 15269597
	[2000/18]
Filing language	JA
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO9857213
	Date:	17.12.1998
	Language:	EN
	[1998/50]
	Type:	A1 Application with search report
	No.:	EP0997761
	Date:	03.05.2000
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 17.12.1998 takes the place of the publication of the European patent application.
	[2000/18]
Search report(s)	International search report - published on:	JP	17.12.1998
	(Supplementary) European search report - dispatched on:	EP	02.08.2000
Classification	IPC:	G02B27/00, H01L21/30, G03F7/20	[2000/18]
	CPC:	G03F7/70933 (EP,KR,US); G02B27/0006 (EP,KR,US); G03F7/70058 (EP,KR,US); G03F7/70241 (EP,KR,US); G03F7/70825 (EP,KR,US); G03F7/70883 (EP,KR,US); (+) G03F7/70891 (EP,KR,US); G03F7/70925 (EP,KR,US) (-)
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/18]
Title	German:	OPTISCHE VORRICHTUNG,VERFAHREN ZU DEREN REINIGUNG,PROJEKTIONSAUSRICHTER UND VERFAHREN ZUR HERSTELLUNG DERSELBEN	[2000/18]
	English:	OPTICAL DEVICE, METHOD OF CLEANING THE SAME, PROJECTION ALIGNER, AND METHOD OF PRODUCING THE SAME	[2000/18]
	French:	DISPOSITIF OPTIQUE, SON PROCEDE DE NETTOYAGE, DISPOSITIF D'ALIGNEMENT DE PROJECTION ET SON PROCEDE DE FABRICATION	[2000/18]
Entry into regional phase	10.12.1999	Translation filed
	20.12.1999	National basic fee paid
	20.12.1999	Search fee paid
	20.12.1999	Designation fee(s) paid
	20.12.1999	Examination fee paid
Examination procedure	07.01.1999	Request for preliminary examination filed International Preliminary Examining Authority: JP
	20.12.1999	Examination requested [2000/18]
	28.01.2003	Despatch of a communication from the examining division (Time limit: M06)
	28.07.2003	Reply to a communication from the examining division
	21.08.2003	Despatch of a communication from the examining division (Time limit: M06)
	23.02.2004	Reply to a communication from the examining division
	23.12.2004	Communication of intention to grant the patent
	03.05.2005	Application deemed to be withdrawn, date of legal effect [2005/45]
	08.06.2005	Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2005/45]
Fees paid	Renewal fee
	13.06.2000	Renewal fee patent year 03
	13.06.2001	Renewal fee patent year 04
	12.06.2002	Renewal fee patent year 05
	12.06.2003	Renewal fee patent year 06
	14.06.2004	Renewal fee patent year 07
	Penalty fee
	Additional fee for renewal fee
	30.06.2005	08 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[X]US4699505 (KOMORIYA SUSUMU [JP], et al) [X] 1,2,30,35,40 * column 5, line 29 - column 8, line 59; figure 8 *;
		[XA]US4704348 (KOIZUMI YASUHIRO [JP], et al) [X] 35 * column 2, line 1 - line 36 * * column 5, line 30 - line 52 * [A] 1,8,30;
		[X]FR2708757 (FUJITSU LTD [JP]) [X] 1,18-20,30,35,40 * page 8, line 23 - page 16, line 32; figure - *;
		[XY]US5430303 (MATSUMOTO YUKAKO [JP], et al) [X] 1-3,8-11,15-17,30,35,38-40,42-45,64-69 * the whole document * [Y] 31;
		[YA]EP0663618 (ASM LITHOGRAPHY BV [NL]) [Y] 31 * page 3, line 16 - line 24 * * page 5, line 34 - line 43; claim 4 *[A] 1-75;
		[X]WO9533594 (AMADA CO LTD [JP], et al) [X] 1,64 * page 3, line 15 - page 12, line 9; figures 1,2B *;
		[A]US5559584 (MIYAJI AKIRA [JP], et al) [A] 1-75 * column 2, line 57 - column 4, line 51 *;
		[E]EP0867774 (NIPPON KOGAKU KK [JP]) [E] 1-3,18-20,30,31,35,38-40,64 * the whole document *
	International search	[Y]JPH03154390 (MITSUBISHI ELECTRIC CORP);
		[X]JPH03155611 (SEIKO EPSON CORP);
		[Y]JPH0855792 (CANON KK);
		[Y]JPH08509652

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